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US 2024/0229217 A9Published application
A method for etching molybdenum
AssigneesImec Vzw, SCREEN Holdings Co., Ltd.
InventorsAntoine Pacco, Nakano Teppei
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Abstract
The disclosure relates to a method for etching a molybdenum feature, comprising the steps of: a) oxidizing a thickness portion of the molybdenum feature using a thermal oxidation process to form a thermal molybdenum oxide layer, and b) dissolving the thermal molybdenum oxide layer using a wet chemistry.
Claims17
A method for etching a molybdenum feature, comprising the steps of:
- a) oxidizing a thickness portion of the molybdenum feature using a thermal oxidation process to form a thermal molybdenum oxide layer, and b) dissolving the thermal molybdenum oxide layer using a wet chemistry.
Dependencies are inferred from the claim text.