Dry-process membrane for filtration
AssigneesCelgard, LLC, Entegris, Inc.
InventorsEric R. White, Sina Bonyadi, Vinay Kalyani
Life of this patent
Estimating the term…
Abstract
A dry-process microporous membrane for filtration, wherein at least one layer of the membrane has an average pore size less than 0.035 microns, preferably between about 0.010 microns to about 0.020 microns, and a thickness less than 14 microns. The membrane may be used in an ultra-filtration or nano-filtration process. The membrane exhibits high dimensional stability.
Claims33
1-53. (canceled)
filter product adapted to filter solvent for use in microelectronics processing comprising:
- a dry process membrane contained in a filter housing,
- wherein at least one layer of the dry-process microporous membrane has:
- (i) an average pore size less than 0.035 microns, and
- (ii) a thickness less than 14 microns.
A method of filtering solvent (e.g., a method of filtering solvent used for microelectronics processing, e.g., a nanofiltration method for filtering a solvent used for microelectronics processing, e.g., an ultrafiltration method for filtering solvent used for microelectronics processing), the method comprising:
- flowing the solvent through a filter product having a dry-process microporous membrane contained in a filter housing,
- wherein at least one layer of the dry-process microporous membrane has:
- (i) an average pore size less than 0.035 microns, and
- (ii) a thickness less than 14 microns.
Dependencies are inferred from the claim text.