Processor System, Correction Method, and Correction Program

A correction method in a processor system that is able to communicate with a charged-particle microscope apparatus, wherein

• the charged-particle microscope apparatus includes
• a charged particle beam irradiation system that includes at least one charged particle source, and irradiates a first region on a sample surface with a first charged particle beam generated using the charged particle source while irradiating a second region on the sample surface with a second charged particle beam generated using the charged particle source,
• a detection system including
• a correction detector that detects a first emitted electron emitted from the first region and a second emitted electron emitted from the second region,
• a first detector that detects the first emitted electron through a part of the correction detector and outputs a first signal, and
• a second detector that detects the second emitted electron through a part of the correction detector and outputs a second signal, and
• a controller that generates a first brightness of a first pixel corresponding to a first position within the first region based on the first signal and generates a second brightness of a second pixel corresponding to a second position within the second region based on the second signal, wherein
• the processor system includes one or more memory resources and one or more processors, and
• the correction method executed by the processor comprises
• (A) storing the first brightness and an output of the correction detector acquired from the charged-particle microscope apparatus in the memory resource,
• (B) specifying a first crosstalk amount from the second emitted electron to the first signal, regarding the amount detected by the first detector, based on the output of the correction detector, and
• (C) correcting the first brightness based on the first crosstalk amount.