Optical apparatus and methods and computer program products useful for manufacturing same
AssigneeMaradin Ltd.
InventorsInbal HERER, Adi BARAM, Matan NAFTALI
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Abstract
Optical apparatus comprising a MEMS substrate having a surface; and a stack of optical coatings which is deposited on the MEMS substrate's surface and which modifies at least one property of light impinging on the stack.
Claims13
1-19. (canceled)
A method for coating MEMS devices, the method comprising:
- fabricating a wafer;
- dicing the wafer into a multiplicity of dies including a first die and a second die;
- and, subsequently,
- adding at least a first optical coating to the first die;
- and
- adding at least a second optical coating to the second die.
A method according to claim 1 wherein said first optical coating comprises a QWP coating.
A method for fabricating optically coated MEMS devices, the method comprising:
- providing materials and thicknesses for at least two layer-types including a first layer-type A;
- and
- a second layer-type B whose refractive index is lower than the first layer's refractive index;
- and
- manufacturing at least two optical elements f1 and f2 wherein optical element f1 is coated with n1 layers of layer-type A interspersed with n1 layers formed of layer-type B and optical element f2 is coated with n2 layers of layer-type A interspersed with n2 layers formed of layer-type B
- where n1 and n2 are two different natural numbers.
A method according to claim 3 wherein at least 3 optical elements f1, f2 and f3 are manufactured, wherein optical element f3 is coated with n3 layers of layer-type A interspersed with n3 layers formed of layer-type B, wherein n1<n2<n3 and wherein increments between n1 and n2, and between n2 and n3, are equal.
A method according to claim 3 which is performed at wafer level.
A method according to claim 3 which is performed at die level.
A system for coating MEMS devices, the system comprising:
- a facility for die fabrication, configured for fabricating a wafer, then dicing the wafer into a multiplicity of dies including a first die and a second die;
- and, subsequently, adding at least a first optical coating to the first die;
- and adding at least a second optical coating to the second die,
- thereby to, first, fabricate generic MEMS and then, at die-level, add different coatings to different instances of the generic MEMS.
A system according to claim 7 wherein said first optical coating comprises a QWP coating.
MEMS apparatus comprising:
- at least two optical elements f1 and f2,
- wherein optical element f1 is coated with n1 layers of a first layer-type A interspersed with n1 layers formed of a second layer-type B whose refractive index is lower than the first layer's refractive index
- and optical element f2 is coated with n2 layers of said layer-type A interspersed with n2 layers formed of said layer-type B
- where n1 and n2 are two different natural numbers,
- thereby to provide a MEMS inventory including optical elements of different heights.
A method according to claim 3 wherein at least one of said optical elements comprises a filter.
A method according to claim 4 wherein said 3 optical elements respectively comprise filters.
The apparatus of claim 9 wherein at least one of said optical elements comprises a filter.
Dependencies are inferred from the claim text.