Superstrate comprising an electrically conductive layer

Abstract

A superstrate can comprise a core body having a first surface and a second surface, the first surface and the second surface being opposite to each other; an electrically conductive layer directly overlying the first surface of the core body; and a capping layer directly overlying the conductive layer, wherein the core body can have an electrical conductivity of not greater than 10−10 S/m; the conductive layer is metal-free and comprises an electrical conductivity of at least 10−4 S/m and a UV transparency at 365 nm of at least 80%; and the capping layer includes a fluoropolymer and has a UV transparency at 365 nm of at least 80%. The capping layer can contribute to an increase of the electrical conductivity of the underlying electrically conductive layer.

Dependencies are inferred from the claim text.