Piezoelectric material composition, method of manufacturing the same, piezoelectric device, and apparatus including the piezoelectric device

A piezoelectric material composition represented by Equation 2,

• 0
• .
• 9
• ⁢
• 6
• ⁢
• (
• Na
• a
• ⁢
• K
• 1
• -
• a
• )
• ⁢
• (
• Nb
• b
• (
• T
• 1
• -
• b
• )
• )
• ⁢
• O
• 3
• -
• (
• 0.04
• -
• x
• )
• ⁢
• M
• A
• ⁢
• M
• B
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• O
• 3
• -
• x
• ⁡
• (
• Bi
• c
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• Ag
• 1
• -
• c
• )
• ⁢
• M
• B
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• O
• 3
• +
• d
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• mol
• ⁢
• %
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• A
• +
• e
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• mol
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• %
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• NaNbO
• 3
• [
• Equation
• ⁢
• 2
• ]
• where T is Sb, Ta, or V, MA is Sr, Ba, or Ca, MB is Zr, Hf, Ti, or Sn, and A is Fe2O3, Co2O3, Mn2O3, ZnO, GeO2, CuO, or NiO, and
• 0.40≤a≤0.60, 0.90≤b≤1.00, 0.30≤c≤0.70, 0.00≤x≤0.04, 0.00<d≤1.00, and 2.00≤e≤4.00.

A method of manufacturing a piezoelectric material composition, the method comprising:

• mixing a matrix material with a seed material to prepare a slurry;
• molding the slurry to prepare a molding element;
• and
• sintering the molding element to prepare a sintered material,
• wherein the sintered material is represented by Equation 2,
• 0
• .
• 9
• ⁢
• 6
• ⁢
• (
• Na
• a
• ⁢
• K
• 1
• -
• a
• )
• ⁢
• (
• Nb
• b
• (
• T
• 1
• -
• b
• )
• )
• ⁢
• O
• 3
• -
• (
• 0.04
• -
• x
• )
• ⁢
• M
• A
• ⁢
• M
• B
• ⁢
• O
• 3
• -
• x
• ⁡
• (
• Bi
• c
• ⁢
• Ag
• 1
• -
• c
• )
• ⁢
• M
• B
• ⁢
• O
• 3
• +
• d
• ⁢
• mol
• ⁢
• %
• ⁢
• A
• +
• e
• ⁢
• mol
• ⁢
• %
• ⁢
• NaNbO
• 3
• [
• Equation
• ⁢
• 2
• ]
• where T is Sb, Ta, or V, MA is Sr, Ba, or Ca, MB is Zr, Hf, Ti, or Sn, and A is Fe2O3, Co2O3, Mn2O3, ZnO, GeO2, CuO, or NiO, and
• 0.40≤a≤0.60, 0.90≤b≤1.00, 0.30≤c≤0.70, 0.00≤x≤0.04, 0.00<d≤1.00, and 2.00≤e≤4.00.

A piezoelectric device, comprising:

• a piezoelectric device layer including a first material and a second material;
• a first electrode part disposed at a first surface of the piezoelectric device layer;
• and
• a second electrode part disposed at a second surface different from the first surface of the piezoelectric device layer,
• wherein the piezoelectric device layer is represented by Equation 2,
• 0
• .
• 9
• ⁢
• 6
• ⁢
• (
• Na
• a
• ⁢
• K
• 1
• -
• a
• )
• ⁢
• (
• Nb
• b
• (
• T
• 1
• -
• b
• )
• )
• ⁢
• O
• 3
• -
• (
• 0.04
• -
• x
• )
• ⁢
• M
• A
• ⁢
• M
• B
• ⁢
• O
• 3
• -
• x
• ⁡
• (
• Bi
• c
• ⁢
• Ag
• 1
• -
• c
• )
• ⁢
• M
• B
• ⁢
• O
• 3
• +
• d
• ⁢
• mol
• ⁢
• %
• ⁢
• A
• +
• e
• ⁢
• mol
• ⁢
• %
• ⁢
• NaNbO
• 3
• [
• Equation
• ⁢
• 2
• ]
• where T is Sb, Ta, or V, MA is Sr, Ba, or Ca, MB is Zr, Hf, Ti, or Sn, and A is Fe2O3, Co2O3, Mn2O3, ZnO, GeO2, CuO, or NiO, and
• 0.40≤a≤0.60, 0.90≤b≤1.00, 0.30≤c≤0.70, 0.00≤x≤0.04, 0.00<d≤1.00, and 2.00≤e≤4.00.