Glass block and method for producing same, and member for semiconductor production apparatus
AssigneeAGC Inc.
InventorsKazuki KANEHARA, Seiji INABA, Shuhei OGAWA
Life of this patent
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Abstract
The present invention relates to a glass block including: Si; and at least one of Mg and Ca, and satisfying, in terms of mol %, 49.0% or less of B2O3, 11.5% or less of P2O5, 10.0 to 59.5% of a (=SiO2+B2O3+P2O5+GeO2), 66.5% or less of (a+Al2O3), 7.0% or less of Ga2O3, 0.44 or less of b (=Al2O3+Ga2O3+In2O3)/a, 20.0% or more of R2O (R2: alkaline earth metal), 50.0% or less of MgO, MgO≥BaO, CaO≥BaO, SrO≥BaO, MgO≥SrO, CaO≥SrO, 1.2% or less of R12O (R1: alkali metal), 4.8% or less of TiO2 or ZrO2, 9.5% or less of MnO2, 11.8% or less of ZnO, 0.067 or less of Ta2O5/SiO2, 15.0% or less of an impurity element, and 0.20 or less of F/O.
Claims15
A glass block comprising:
- silicon;
- and
- at least one of magnesium and calcium, wherein
- when an alkali metal element is expressed as R1 and an alkaline earth metal element is expressed as R2, in terms of mol percentage based on oxides,
- a content of B2O3 is 49.0 mol % or less,
- a content of P2O5 is 11.5 mol % or less,
- a total of contents of SiO2, B2O3, P2O5, and GeO2 is 10.0 mol % or more and 59.5 mol % or less,
- a total of contents of SiO2, B2O3, P2O5, GeO2, and Al2O3 is 66.5 mol % or less,
- a content of Ga2O3 is 7.0 mol % or less,
- a ratio b/a of a total b of contents of Al2O3, Ga2O3, and In2O3 to a total a of the contents of SiO2, B2O3, P2O5, and GeO2 is 0.44 or less,
- a content of R2O is 20.0 mol % or more,
- a content of MgO is 50.0 mol % or less,
- the content of MgO is equal to or more than a content of BaO, a content of CaO is equal to or more than the content of BaO, and a content of SrO is equal to or more than the content of BaO,
- the content of MgO is equal to or more than the content of SrO, and the content of CaO is equal to or more than the content of SrO,
- a content of R12O is 1.2 mol % or less,
- a content of TiO2 or ZrO2 is 4.8 mol % or less,
- a content of MnO2 is 9.5 mol % or less,
- a content of ZnO is 11.8 mol % or less,
- a ratio Ta2O5/SiO2 of a content of Ta2O5 to a content of SiO2 is 0.067 or less,
- a content of an impurity element in terms of an oxide is 15.0 mol % or less, provided that the impurity element is a metal element excluding silicon, boron, phosphorus, germanium, aluminum, gallium, indium, an alkaline earth metal element, yttrium, an alkali metal element, titanium, zirconium, manganese, zinc, and tantalum, and
- a ratio F/O of a content F of fluorine to a content O of oxygen is 0.20 or less.
Dependencies are inferred from the claim text.