Chemical liquid purification method and chemical liquid
AssigneeFUJIFILM Corporation
InventorsTetsuya KAMIMURA, Masahiro YOSHIDOME, Yukihisa KAWADA
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AssigneeFUJIFILM Corporation
InventorsTetsuya KAMIMURA, Masahiro YOSHIDOME, Yukihisa KAWADA
Estimating the term…
An object of the present invention is to provide a chemical liquid purification method which makes it possible to obtain a chemical liquid having excellent defect inhibition performance. Another object of the present invention is to provide a chemical liquid. The chemical liquid purification method according to an embodiment of the present invention is a chemical liquid purification method including obtaining a chemical liquid by purifying a substance to be purified containing an organic solvent, in which a content of the stabilizer in the substance to be purified with respect to the total mass of the substance to be purified is equal to or greater than 0.1 mass ppm and less than 100 mass ppm.
A chemical liquid comprising:
The chemical liquid according to 1,
Dependencies are inferred from the claim text.