Alignment pattern having an e shape
AssigneeMicron Technology, Inc.
InventorChinaru Takahashi
Life of this patent
Estimating the term…
Abstract
An apparatus includes an alignment pattern which comprises: a first line portion of a first material extending in a first direction; a second line portion of the first material extending in the first direction in parallel to the first line portion; a third line portion of the first material extending in a second direction perpendicular to the first direction such that the third line portion connects an edge of the first line portion and an edge of the second line portion; and a fourth line portion of a second material arranged between the first line portion and the second line portion and extending in the first direction.
Claims18
An apparatus comprising an alignment pattern which comprises:
- a first line portion of a first material extending in a first direction;
- a second line portion of the first material extending in the first direction in parallel to the first line portion;
- a third line portion of the first material extending in a second direction perpendicular to the first direction such that the third line portion connects an edge of the first line portion and an edge of the second line portion;
- and
- a fourth line portion of a second material arranged between the first line portion and the second line portion and extending in the first direction.
An apparatus comprising an E-shaped alignment pattern at a corner thereof.
An apparatus comprising an alignment pattern which comprises:
- a first line portion extending in a first direction;
- a second line portion extending in the first direction in parallel to the first line portion;
- a third line portion extending in a second direction perpendicular to the first direction such that the third line portion connects an edge of the first line portion and an edge of the second line portion;
- and
- a fourth line portion arranged between the first line portion and the second line portion and extending in the first direction.
Dependencies are inferred from the claim text.