Collision Judgment Apparatus, Recording Medium Recording Program, and Collision Judgment Method

A computer-readable recording medium recording a program which, when executed, causes a computer to function as:

• judgment means configured to judge presence or absence of overlap between a dynamic object having a position which changes in a sample chamber of a charged particle beam apparatus, and a static object having a position which does not change in the sample chamber, by collating point group information which represents, with a group of points, a three-dimensional shape of the dynamic object, and which comprises position information of the dynamic object, and voxel group information which represents, with a group of voxels, a three-dimensional shape of the static object, which comprises position information of the static object, and which is formed into a database;
• and
• output means configured to output a result of judgment of the judgment means, wherein
• a coordinate system comprising a three-dimensional orthogonal coordinate system formed from three coordinate axes which are orthogonal to each other is defined, and
• the judgment means is configured to judge the presence or absence of overlap between the dynamic object and the static object by collating, for each of the coordinate axes, voxel group information representing the static object which is present on a movement path of the dynamic object, and point group information representing the dynamic object.

A method of judging collision, the method comprising:

• generating, based on a three-dimensional model representing a three-dimensional shape of a dynamic object having a position which changes in a sample chamber of a charged particle beam apparatus, point group information which represents, with a group of points, the three-dimensional shape of the dynamic object, and which comprises position information of the dynamic object;
• generating, based on a three-dimensional model representing a three-dimensional shape of a static object having a position which does not change in the sample chamber, point group information which represents, with a group of points, the three-dimensional shape of the static object, and which comprises position information of the static object;
• and
• generating, based on the point group information of the static object, voxel group information which represents, with a group of voxels, the three-dimensional shape of the static object, and which is formed into a database, wherein
• a coordinate system comprising a three-dimensional orthogonal coordinate system formed from three coordinate axes which are orthogonal to each other is defined, and
• the method further comprises judging presence or absence of overlap between the dynamic object and the static object by collating, for each of the coordinate axes, voxel group information representing the static object which is present on a movement path of the dynamic object, and point group information representing the dynamic object.