Imprint apparatus, imprint method and article manufacturing method

An imprint apparatus for performing an imprint process of forming a pattern made of a cured product of an imprint material on a substrate using a mold, comprising:

• a mold holding unit configured to hold the mold;
• an adjusting unit configured to adjust a pressure difference between a first pressure on a second surface on an opposite side of a first surface on which a pattern of the mold held by the mold holding unit is formed and a second pressure in a first space between the substrate and the first surface of the mold;
• and
• a control unit configured to control the imprint process,
• wherein the imprint process includes a separation process of separating the mold from the pattern made of the cured product of the imprint material, and
• the control unit controls, in the separation process, the adjustment of the pressure difference by the adjusting unit so that the first pressure is smaller than the second pressure.