Pinhole detection device
AssigneeToyo Kohan Co., Ltd.
InventorsRyou BABASAKI, Kaoru IMASHIGE, Katsunari MIYAKE
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Abstract
The problem solved by the present invention is to provide a pinhole detection device with an improved accuracy of detecting pinholes. The detection unit of the pinhole detection device includes a plurality of optical fibers that transmit light that has passed through the object to be inspected. The plurality of optical fibers are arranged side by side while facing a light source. When a maximum detectable angle at which the pinhole with respect to an optical axis of the light source is detectable is defined as θ, a maximum angle of incidence of light that can be transmitted by the optical fiber with respect to the optical axis of the light source is set in a range of θ+0° to θ+5°.
Claims5
A pinhole detection device comprising:
- a light source that emits light to an object to be inspected;
- an optical lens disposed between the light source and the object to be inspected;
- and
- a detection unit that detects light that has been converged by the optical lens and passed through a pinhole in the object to be inspected,
- wherein the detection unit includes an optical fiber that transmits the light that has passed through the pinhole in the object to be inspected, and
- wherein when a maximum detectable angle at which the pinhole with respect to an optical axis of the light source is detectable is defined as θ, a maximum angle of incidence of light that can be transmitted by the optical fiber with respect to the optical axis of the light source is in a range of θ+0° to θ+5°.
Dependencies are inferred from the claim text.