Semiconductor chip with embedded microfluidic channels and method of fabricating the same
AssigneeNational Taiwan University
InventorsJun-Chau Chien, Wei-Yang Weng
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AssigneeNational Taiwan University
InventorsJun-Chau Chien, Wei-Yang Weng
Estimating the term…
A semiconductor chip with embedded microfluidic channels includes a semiconductor substrate, a circuit structure layer, a first microfluidic channel and a micro via hole. The circuit structure layer includes a first metal layer, a first insulation layer and a second metal layer sequentially disposed on a substrate surface of the semiconductor substrate along a stacking direction. A plurality of first bridge patterns penetrates the first insulation layer, and are each electrically connected to the first metal layer and/or the second metal layer. The first microfluidic channel and the micro via hole are embedded in the circuit structure layer. In the stacking direction, a first height of the first microfluidic channel is equal to a first thickness of the first metal layer. In any direction parallel to the substrate surface, a hole width of the micro via hole is equal to a pattern width of each of the first bridge patterns.
A semiconductor chip with embedded microfluidic channels, comprising:
A method of fabricating a semiconductor chip with embedded microfluidic channels, comprising:
Dependencies are inferred from the claim text.