Apparatus and Method for Fabrication of Shield Plate
AssigneeJEOL Ltd.
InventorsTsutomu Negishi, Munehiro Kozuka
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Abstract
There is provided a shield plate fabrication apparatus capable of fabricating a shield plate easily. The shield plate is included in a sample milling apparatus which mills a sample by shielding a part of the sample with the shield plate and irradiating the sample with a charged particle beam. The fabrication apparatus includes: a base plate holding shaft for rotatably holding a base plate and winding tape around the base plate; and a tension mechanism for applying tension to the tape while it is being wound around the base plate.
Claims8
A shield plate fabrication apparatus for fabricating a shield plate of a sample milling apparatus which mills a sample by shielding a part of the sample with the shield plate and irradiating the sample with a charged particle beam, said shield plate fabrication apparatus comprising:
- a base plate holding shaft for rotatably holding a base plate and winding tape around the base plate;
- and
- a tension mechanism for applying tension to the tape while it is being wound around the base plate.
A method of fabricating a shield plate of a sample milling apparatus for milling a sample by shielding a part of the sample with the shield plate and irradiating the sample with a charged particle beam, said method comprising the steps of:
- mounting a base plate to a base plate holding shaft that rotatably holds the base plate;
- laying tape between the base plate held to the base plate holding shaft and a tension mechanism;
- and
- winding the tape around the base plate by rotating the base plate holding shaft while applying tension to the tape by the tension mechanism.
Dependencies are inferred from the claim text.