# US 2024/0204697 A1 · Apparatus and method for contactless transportation of a carrier > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2024/0204697 A1 - Document ID: US20240204697A1 - Status: Published application - Kind: A1 - Application number: 18/500,462 - Filed: 2023-11-02 - Published: 2024-06-20 - Earliest claimed: 2022-12-14 - Assignees: Applied Materials, Inc. - Applicants: Applied Materials, Inc. - Inventors: Thorsten MEISS; Alexander SENDOBRY - Web page: https://patentgrep.com/patent/US20240204697A1 ## CPC - H02K 41/03: Synchronous motors; Motors moving step by step; Reluctance motors (H02K41/035 takes precedence) - H02N 15/00: Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for (electric or magnetic devices for holding work on machine tools B23Q3/15 {; monorail vehicle propulsion or suspension B60L13/00}; sliding or levitation devices for railway systems B61B13/08; material handling devices associated with conveyors incorporating devices with electrostatic or magnetic grippers B65G47/92; separating thin or filamentary articles from piles using magnetic force B65H3/16; delivering thin or filamentary articles from magnetic holders by air blast or suction B65H29/24; bearings using magnetic or electric supporting means F16C32/04; relieving bearing loads using magnetic means F16C39/06; magnets H01F7/00; dynamo-electric clutches or brakes H02K49/00 {; electric furnaces with simultaneous levitation and heating H05B6/32}) - B65G 54/02: electrostatic, electric, or magnetic - H02K: DYNAMO-ELECTRIC MACHINES (dynamo-electric relays H01H53/00; conversion of DC or AC input power into surge output power {H03K3/53}) - H02N: ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR - B65G: TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS (packaging B65B; handling thin or filamentary materials, e.g. paper sheets or thread, B65H; cranes B66C; portable mobile or lifting or hauling appliances, e.g. hoists, B66D; devices for lifting or lowering goods for loading or unloading purposes, e.g. fork-lift trucks, B66F9/00; emptying bottles, jars, casks, barrels or similar containers, not otherwise provided for, B67C9/00; delivering or transferring liquids B67D; filling or discharging vessels for liquefied, solidified or compressed gases F17C; pipe-line systems for fluids F17D) ## Abstract An apparatus for contactless transportation of a carrier is provided. The apparatus includes the carrier, being a substrate carrier or a mask carrier. The apparatus includes a linear reluctance motor for providing both a contactless levitation and a contactless drive of the carrier. The linear reluctance motor includes one or more linear stators defining a transportation track for the carrier. The linear reluctance motor includes a mover attached to the carrier. The linear reluctance motor includes a set of electromagnets and a first magnetic material. The one or more linear stators include the set of electromagnets and the mover includes the first magnetic material, or the mover includes the set of electromagnets and the one or more linear stators include the first magnetic material. The apparatus includes a controller connected to the set of electromagnets. ## Claims ### Claim 1 A substrate carrier assembly, comprising: a carrier configured to support a substrate; and a first mover coupled to the carrier, the first mover comprising: a first set of poles extending in a first direction; and a second mover coupled to the carrier, the second mover comprising: a second set of poles extending in the first direction, wherein: each pole of the first set and the second set comprise a ferromagnetic material; the first set is spaced apart in a second direction from the second set; and the first direction and the second direction are at a first angle to each other. ### Claim 2 (depends on 1) The substrate carrier assembly of claim 1, further comprising a first elongated bar that comprises the first set of poles and a second elongated bar that comprises the second set of poles. ### Claim 3 (depends on 2) The substrate carrier assembly of claim 2, wherein the first set of poles and the second set of poles are formed in a linear array that extends in the first direction. ### Claim 4 (depends on 3) The substrate carrier assembly of claim 3, wherein the first set of poles and the second set of poles extend in a third direction that is perpendicular to the first direction and the second direction. ### Claim 5 (depends on 1) The substrate carrier assembly of claim 1, further comprising: a third mover coupled to the carrier, the third mover comprising: a third set of poles extending in the second direction; and a fourth mover coupled to the carrier, the fourth mover comprising: a fourth set of poles extending in the second direction, wherein: each pole of the third set of poles and the fourth set of poles comprise a ferromagnetic material; and the third set of poles is spaced apart in the first direction from the fourth set of poles. ### Claim 6 (depends on 1) The substrate carrier assembly of claim 1, wherein the carrier comprises an opening for receiving the substrate. ### Claim 7 (depends on 6) The substrate carrier assembly of claim 6, wherein the opening extends in the second direction and a third direction, wherein the third direction is perpendicular to the first direction and the second direction. ### Claim 8 (depends on 6) The substrate carrier assembly of claim 6, further comprising one or more support portions coupled to the carrier and extending into the opening, the one or more support portions being configured to support the substrate. ### Claim 9 (depends on 1) The substrate carrier assembly of claim 1, wherein the first set of poles and the second set of poles each comprise a surface that comprises a plurality protrusions. ### Claim 10 (depends on 1) The substrate carrier assembly of claim 1, wherein the carrier further comprises a first edge and a second edge, which is opposite to the first edge, the first set of poles are positioned adjacent to the first edge, and the second set of poles are positioned adjacent to the second edge. ### Claim 11 (depends on 1) The substrate carrier assembly of claim 1, wherein the carrier is configured to support a second substrate. ### Claim 12 (depends on 1) The substrate carrier assembly of claim 1, further comprising a first elongated bar that comprises the first set of poles and a second elongated bar that comprises the second set of poles, and the first elongated bar and the second elongated bar each comprise a silicon steel, a ferritic steel or a martensitic steel. ### Claim 13 A substrate carrier assembly, comprising: a carrier configured to support a substrate; and a first elongated bar coupled to the carrier, comprising: a first set of poles extending in a first direction; and a second elongated bar coupled to the carrier, comprising: a second set of poles extending in a second direction, wherein: each pole of the first set and the second set comprise a ferromagnetic material; and the first direction and the second direction are at a first angle to each other. ### Claim 14 (depends on 13) The substrate carrier assembly of claim 13, wherein the first set of poles form a first linear arrangement in the first direction, and wherein the second set of poles form a second linear arrangement in the second direction. ### Claim 15 (depends on 13) The substrate carrier assembly of claim 13, wherein the carrier comprises an opening for receiving the substrate. ### Claim 16 (depends on 15) The substrate carrier assembly of claim 15, further comprising one or more support portions coupled to the carrier and extending into the opening, the one or more support portions being configured to support the substrate. ### Claim 17 (depends on 13) The substrate carrier assembly of claim 13, wherein the first elongated bar and the second elongated bar each comprise a silicon steel, a ferritic steel or a martensitic steel. ### Claim 18 A substrate carrier assembly, comprising: a carrier configured to support a substrate; and a mover coupled to the carrier, the mover comprising: a first set of poles extending in a first direction; a second set of poles extending in a second direction; and a third set of poles extending in the first direction or the second direction, wherein: each pole of the first set, the second set, and the third set comprise ferromagnetic material; and the first direction and the second direction are at a first angle to each other. ### Claim 19 (depends on 13) The substrate carrier assembly of claim 13, wherein the carrier comprises an opening for receiving the substrate, and wherein the carrier substrate assembly further comprises: one or more support portions coupled to the carrier and extending into the opening, the one or more support portions being configured to support the substrate. ### Claim 20 (depends on 18) The substrate carrier assembly of claim 18, wherein the first set of poles are arranged to provide a reluctance-based angular force for moving the carrier in the first direction, and wherein the second set of poles are arranged to provide another reluctance-based angular force for moving the carrier in the second direction.