# US 2024/0204516 A1 · Esd protection device with reduced harmonic distortion

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- Number: US 2024/0204516 A1
- Document ID: US20240204516A1
- Status: Published application
- Kind: A1
- Application number: 18/591,681
- Filed: 2024-02-29
- Published: 2024-06-20
- Earliest claimed: 2020-09-21
- Assignees: Infineon Technologies AG
- Applicants: Infineon Technologies AG
- Inventors: Egle Tylaite; Joost Adriaan Willemen
- Web page: https://patentgrep.com/patent/US20240204516A1

## CPC

- H02H 9/046: {responsive to excess voltage appearing at terminals of integrated circuits}
- H10D 89/611: {using diodes as protective elements}
- H10D 89/911: {using passive elements as protective elements}
- H02H: EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS (indicating or signalling undesired working conditions G01R, e.g. G01R31/00, G08B; locating faults along lines G01R31/08; emergency protective devices H01H)
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES

## Abstract

An overvoltage protection device includes a semiconductor die, first and second semiconductor devices that are monolithically integrated in the semiconductor die and arranged in an anti-serial configuration with a conductive link connected between the first and second semiconductor devices at a central node of the overvoltage protection device, the first and second semiconductor devices each being two terminal semiconductor devices with one way conduction characteristics, a first conductive electrode connected to a terminal of the first semiconductor device that is opposite from the central node, a second conductive electrode connected to a terminal of the second semiconductor device that is opposite from the central node, a monolithically integrated feature of the semiconductor die that compensates for a parasitic capacitance of the overvoltage protection device such that the capacitances of the overvoltage protection device under operation are substantially symmetrical with respect to the central node.

## Claims

### Claim 1

An overvoltage protection device, comprising:
a semiconductor die;
first and second semiconductor devices that are monolithically integrated in the semiconductor die and arranged in an anti-serial configuration with a conductive link connected between the first and second semiconductor devices at a central node of the overvoltage protection device, the first and second semiconductor devices each being two terminal semiconductor devices with one way conduction characteristics;
a first conductive electrode connected to a terminal of the first semiconductor device that is opposite from the central node;
a second conductive electrode connected to a terminal of the second semiconductor device that is opposite from the central node;
a monolithically integrated feature of the semiconductor die that compensates for a parasitic capacitance of the overvoltage protection device such that the capacitances of the overvoltage protection device under operation are substantially symmetrical with respect to the central node.

### Claim 2 (depends on 1)

The overvoltage protection device of claim 1, wherein the parasitic capacitance comprises at least a portion of self-capacitance of the conductive link.

### Claim 3 (depends on 2)

The overvoltage protection device of claim 2, wherein the monolithically integrated feature forms a capacitance opposite the central node which substantially matches the self-capacitance of the conductive link.

### Claim 4 (depends on 1)

The overvoltage protection device of claim 1, wherein the monolithically integrated feature comprises the first conductive electrode and the second conductive electrode, and wherein the first conductive electrode is larger than the second conductive electrode.

### Claim 5 (depends on 1)

The overvoltage protection device of claim 1, wherein the monolithically integrated feature is integrally formed in a semiconductor body of the semiconductor die.

### Claim 6

A semiconductor assembly, comprising:
a circuit carrier comprising first and second planar die mounting pads;
an overvoltage protection device mounted on the circuit carrier and comprising first and second semiconductor devices arranged in an anti-serial configuration with a conductive link connected between the first and second semiconductor devices at a central node of the overvoltage protection device, the first and second semiconductor devices each being two terminal semiconductor devices with one way conduction characteristics,
wherein a first terminal of the overvoltage protection device is attached and electrically connected to the first planar die mounting pad,
wherein a second terminal of the overvoltage protection device is attached and electrically connected to the second planar die mounting pad,
wherein a first transmission path exists between the second planar die mounting pad and the central node and a second transmission path exists between the second planar die mounting pad and the central node,
wherein a self-capacitance of the conductive link contributes to a total capacitance of the second transmission path during operation of the overvoltage protection device,
wherein the overvoltage protection device further comprises an additional capacitance in the first transmission path, and
wherein the additional capacitance is greater than the self-capacitance of the conductive link.

### Claim 7 (depends on 6)

The semiconductor assembly of claim 6, wherein conductive connections of the circuit carrier to the first metal electrode and the second metal electrode are asymmetric.

### Claim 8 (depends on 7)

The semiconductor assembly of claim 7, wherein the additional capacitance substantially matches a sum of the self-capacitance of the conductive link and a fourth net capacitance, wherein fourth net capacitance being a capacitance in the second transmission path during operation of the overvoltage protection device resulting from the conductive connections of the circuit carrier.

### Claim 9 (depends on 6)

The semiconductor assembly of claim 6, wherein the overvoltage protection device is a single semiconductor die that comprises the first and second semiconductor devices monolithically integrated therein, and wherein the additional capacitance is a monolithically integrated feature of the single semiconductor die.

### Claim 10 (depends on 6)

The semiconductor assembly of claim 6, wherein the overvoltage protection device comprises a first semiconductor die that comprises the first semiconductor device monolithically integrated therein and a second semiconductor die that comprises the second semiconductor device monolithically integrated therein, wherein the additional capacitance is a monolithically integrated feature of the first or second semiconductor die.
