# US 2024/0201486 A1 · Controlling aberration in an optical system, a metrology system, lithographic apparatus, and methods thereof

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- Number: US 2024/0201486 A1
- Document ID: US20240201486A1
- Status: Published application
- Kind: A1
- Application number: 18/556,801
- Filed: 2022-03-31
- Published: 2024-06-20
- Earliest claimed: 2021-04-23
- Assignees: ASML Netherlands B.V.
- Applicants: ASML Netherlands B.V.
- Inventors: Krishanu SHOME; Scott Douglas COSTON; Kan DU
- Web page: https://patentgrep.com/patent/US20240201486A1

## CPC

- G02B 27/0025: {for optical correction, e.g. distorsion, aberration}
- G02B 3/0087: {with index gradient}
- G03F 7/70266: {Adaptive optics, e.g. deformable optical elements for wavefront control, e.g. for aberration adjustment or correction}
- G03F 7/70325: {Resolution enhancement techniques not otherwise provided for, e.g. darkfield imaging, interfering beams, spatial frequency multiplication, nearfield lenses or solid immersion lenses}
- G03F 7/706: {Aberration measurement}
- G03F 7/70616: {Monitoring the printed patterns}
- G03F 9/7046: {Strategy, e.g. mark, sensor or wavelength selection}
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)

## Abstract

A method includes determining optical aberrations of an optical system, identifying an illumination profile that compensates for the optical aberrations of the optical system, and curing a layer of optical cement of an optical device using a modulated energy beam to achieve the identified illumination profile.

## Claims

### Claim 1

A method, comprising:
determining optical aberrations of an optical system;
identifying, using processing circuitry, an illumination profile that compensates for the optical aberrations of the optical system; and
curing a layer of optical cement of an optical device using a modulated energy beam to achieve the identified illumination profile.

### Claim 2 (depends on 1)

The method of claim 1, further comprising:
compensating for the determined optical aberrations of the optical system by disposing the optical device with the cured layer in an optical path of the optical system.

### Claim 3 (depends on 1)

The method of claim 1, wherein the optical device comprises a first optical element and a second optical element; and
wherein the optical layer of optical cement is deposited between the first optical element and the second optical element.

### Claim 4 (depends on 3)

The method of claim 3, forming a lens using the first optical element and the second optical element.

### Claim 5 (depends on 1)

The method of claim 1, wherein the curing of the layer of optical cement is performed after coating a surface of the optical device.

### Claim 6 (depends on 1)

The method of claim 1, wherein the curing comprises using a modulated energy beam having a wavelength of the energy beam in the UV spectrum.

### Claim 7 (depends on 1)

The method of claim 1, further comprising:
controlling a birefringence of the optical system, wherein the optical device comprises an optically active material.

### Claim 8 (depends on 7)

The method of claim 7, wherein the controlling of the birefringence of the optical system comprises using an optical cement including the optically active material.

### Claim 9 (depends on 1)

The method of claim 1, further comprising:
modulating the energy beam using a microelectromechanical systems (MEMS) device.

### Claim 10 (depends on 1)

The method of claim 1, wherein identifying the illumination profile comprising:
determining an irradiance of the beam based on a thickness of the layer of optical cement and a type of the optical cement.

### Claim 11 (depends on 10)

The method of claim 10, wherein determining the irradiance of the beam is further based on a stress between a curved surface of the optical device and the layer of optical cement.

### Claim 12

A system, comprising:
an optical system having an optical device;
a processor configured to
determine optical aberrations of the optical system, and
identify an illumination profile that compensates for the optical aberrations of; and
an illumination system configured to
generate an energy beam,
modulate the energy beam with the illumination profile, and
cure a layer of optical cement of the optical device of the optical system with the energy beam.

### Claim 13 (depends on 12)

The system of claim 12, wherein the optical device comprises a first optical element and a second optical element; and
wherein the optical layer of optical cement is deposited between the first optical element and the second optical element.

### Claim 14 (depends on 13)

The system of claim 13, wherein the first optical element and the second optical element form a lens.

### Claim 15 (depends on 12)

The system of claim 12, wherein the optical device comprises a coated surface.

### Claim 16 (depends on 12)

The system of claim 12, wherein the optical device includes a curved surface.

### Claim 17 (depends on 12)

The system of claim 12, wherein the illumination system comprises a microelectromechanical systems (MEMS) device to modulate the energy beam.

### Claim 18 (depends on 12)

The system of claim 12, wherein the optical cement includes an optically active material.