# US 2024/0201138 A1 · Sensor device, a photo-acoustic imaging device and a method for detecting a measurand > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2024/0201138 A1 - Document ID: US20240201138A1 - Status: Published application - Kind: A1 - Application number: 18/532,687 - Filed: 2023-12-07 - Published: 2024-06-20 - Earliest claimed: 2022-12-16 - Assignees: Imec Vzw - Applicants: Imec Vzw - Inventors: Fabrice-Roland LAMBERTI; Roelof JANSEN; Xavier ROTTENBERG; Jon KJELLMAN - Web page: https://patentgrep.com/patent/US20240201138A1 ## CPC - G01D 5/268: {using optical fibres (G01D5/28 - G01D5/38 take precedence)} - G01N 29/36: Detecting the response signal {, e.g. electronic circuits specially adapted therefor} - G01K 11/32: using changes in transmittance, scattering or luminescence in optical fibres - G01N 21/00: Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light (G01N3/00 - G01N19/00 take precedence) - G01N 29/2418: {using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics (photoacoustic cells G01N21/1702; measuring characteristics of vibrations by using radiation-sensitive means G01H9/00; acousto-optical conversion techniques for short-range imaging G01S15/8965; sound-producing devices using laser bundle G10K15/046)} - G02B 6/29335: {Evanescent coupling to a resonator cavity, i.e. between a waveguide mode and a resonant mode of the cavity (wavelength selective means based on resonator cavity coupled non-evanescently G02B6/29356, G02B6/29358)} - A61B 5/0095: {by applying light and detecting acoustic waves, i.e. photoacoustic measurements} - G01D: MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) - G01K: MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR (radiation pyrometry G01J5/00) - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS - A61B: DIAGNOSIS; SURGERY; IDENTIFICATION (usefulness limited to only animals A61D) ## Abstract A sensor device comprises: a plurality of sensors, wherein each sensor comprises an optical resonance element configured to be affected by a measurand and has a mutually unique optical resonance frequency; the sensors being configured to receive at least one of a first and a second sensor interrogation signals forming a plurality of signal component pairs, wherein a difference in frequency between the frequencies in the signal component pair is different for different signal component pairs; wherein each sensor is configured to modulate an optical intensity of at least one frequency of a mutually unique signal component pair; and a detector, being configured to receive the first sensor interrogation signal and the second sensor interrogation signal, wherein the detector is configured to detect a plurality of mutually unique beat frequencies for detecting a plurality of measurements by the plurality of sensors. ## Claims ### Claim 1 A sensor device comprising: a plurality of sensors, wherein each sensor comprises an optical resonance element, wherein an optical characteristic of the optical resonance element is configured to be affected by a measurand to be measured by the sensor and wherein each sensor in the plurality of sensors has a mutually unique optical resonance frequency; the plurality of sensors being configured to receive at least one of a first and a second sensor interrogation signals, wherein the first sensor interrogation signal comprises a first optical frequency comb of first frequencies defining a plurality of first signal components being separated by a first repetition frequency, wherein the second sensor interrogation signal comprises a second optical frequency comb of second frequencies defining a plurality of second signal components being separated by a second repetition frequency different from the first repetition frequency, wherein each of the plurality of first signal components is associated with a respective one of the plurality of second signal components to form a plurality of signal component pairs, wherein a difference in frequency between the associated first signal component and second signal component is different for different signal component pairs; wherein an optical resonance of the optical resonance element of each sensor is associated with one, mutually unique, signal component pair of the plurality of signal component pairs such that each sensor is configured to modulate the at least one of the first and second sensor interrogation signal by the measurand to modulate an optical intensity and/or phase of at least one of the associated first signal component and second signal component of the mutually unique signal component pair; and a detector, being configured to receive the first sensor interrogation signal and the second sensor interrogation signal, at least one of which being modulated by the plurality of sensors being affected by the measurand, wherein the detector is configured to detect a plurality of beat frequencies corresponding to mutually unique differences in frequency between the associated first signal component and second signal component for different signal component pairs for detecting a plurality of measurements by the plurality of sensors. ### Claim 2 (depends on 1) The sensor device according to claim 1, further comprising at least one source configured to generate the first optical frequency comb and the second optical frequency comb. ### Claim 3 (depends on 1) The sensor device according to claim 1, wherein a frequency offset between signal component pairs of the plurality of signal component pairs is larger than an optical mode bandwidth of the resonance elements of the sensors associated with the signal component pairs. ### Claim 4 (depends on 1) The sensor device according to claim 1, wherein a frequency offset between beat frequencies correspond to a difference between the first repetition frequency and the second repetition frequency and wherein the frequency offset between beat frequencies is larger than two times a cut-off frequency of sensitivity of the plurality of sensors. ### Claim 5 (depends on 1) The sensor device according to claim 1, further comprising read-out circuitry, which is configured to receive a measurement signal from the detector and is configured to separate signals corresponding to different beat frequencies for separate read-out of measurements by each sensor of the plurality of sensors. ### Claim 6 (depends on 5) The sensor device according to claim 5, wherein the read-out circuitry is configured to form separate signals in separate read-out channels, wherein each read-out channel is configured to demodulate the measurement signal using a demodulation signal having a frequency corresponding to the respective beat frequency. ### Claim 7 (depends on 6) The sensor device according to claim 6, wherein each read-out channel further configured to remove DC components of the measurement signal. ### Claim 8 (depends on 1) The sensor device according to claim 1, wherein the plurality of sensors are configured to receive both the first and the second sensor interrogation signals, wherein each sensor is configured to modulate both the first and the second sensor interrogation signal by the measurand to modulate the optical intensity and/or phase of the associated first signal component and second signal component; and wherein the detector is configured to receive the first sensor interrogation signal and the second sensor interrogation signal, both of which being modulated by the plurality of sensors being affected by the measurand. ### Claim 9 (depends on 1) The sensor device according to claim 1, wherein the plurality of sensors are configured to receive the first sensor interrogation signals, wherein each sensor is configured to modulate the first sensor interrogation signal by the measurand to modulate the optical intensity and/or phase of the associated first signal component; and wherein the detector is configured to receive the first sensor interrogation signal being modulated by the plurality of sensors being affected by the measurand and the second sensor interrogation signal being unaffected by the plurality of sensors. ### Claim 10 (depends on 1) The sensor device according to claim 1, wherein each sensor is configured to sense the measurand by the optical resonance frequency of the optical resonance element being changed in dependence of the measurand. ### Claim 11 (depends on 1) The sensor device according to claim 1, wherein each sensor is configured to generate a time-varying modulation of the at least one of the first and second sensor interrogation signal by receiving a time-varying measurand signal. ### Claim 12 (depends on 1) The sensor device according to claim 1, wherein the optical resonance element of each sensor is a waveguide resonator. ### Claim 13 (depends on 1) The sensor device according to claim 1, wherein the detector is a photo-sensitive element configured to detect an intensity of incident light on the photo-sensitive element. ### Claim 14 (depends on 1) A photo-acoustic imaging device comprising: the sensor device according to claim 1, wherein each sensor of the plurality of sensors comprises an opto-mechanical element for receiving an acoustic wave forming the measurand, and wherein the opto-mechanical element is configured to be affected by the received acoustic wave so as to change the optical characteristic of the optical resonance element. ### Claim 15 A method for detecting a measurand, said method comprising: receiving, by a plurality of sensors, at least one of a first and a second sensor interrogation signals, wherein the first sensor interrogation signal comprises a first optical frequency comb of first frequencies defining a plurality of first signal components being separated by a first repetition frequency, wherein the second sensor interrogation signal comprises a second optical frequency comb of second frequencies defining a plurality of second signal components being separated by a second repetition frequency different from the first repetition frequency, wherein each of the plurality of first signal components is associated with a respective one of the plurality of second signal components to form a plurality of signal component pairs, wherein a difference in frequency between the associated first signal component and second signal component is different for different signal component pairs; modulating, by each sensor, the at least one of the first and second sensor interrogation signal by the measurand, wherein each sensor comprises an optical resonance element having a mutually unique optical resonance frequency and wherein an optical resonance of the optical resonance element of each sensor is associated with one, mutually unique, signal component pair of the plurality of signal component pairs, wherein each sensor modulates an optical intensity and/or phase of at least one of the associated first signal component and second signal component of the mutually unique signal component pair; receiving, by a detector, the first sensor interrogation signal and the second sensor interrogation signal, at least one of which being modulated by the plurality of sensors being affected by the measurand, and detecting, by the detector, a plurality of beat frequencies corresponding to mutually unique differences in frequency between the associated first signal component and second signal component for different signal component pairs for detecting a plurality of measurements by the plurality of sensors.