# US 2024/0201136 A1 · Calculation device and calculation method

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- Number: US 2024/0201136 A1
- Document ID: US20240201136A1
- Status: Published application
- Kind: A1
- Application number: 18/506,053
- Filed: 2023-11-09
- Published: 2024-06-20
- Earliest claimed: 2022-12-16
- Assignees: Samsung Electronics Co., Ltd.
- Applicants: Samsung Electronics Co., Ltd.
- Inventors: Koji Murata; Fumie Machida; Seunghyun Kim
- Web page: https://patentgrep.com/patent/US20240201136A1

## CPC

- G01N 27/72: by investigating magnetic variables
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)

## Abstract

A calculation device includes a calculation portion that divides a sample having a numerical solution applying portion, a connecting portion and an analytic solution applying portion into a plurality of cells, and calculates an electromagnetic field of each cell based on a physical property value associated with the cell. The calculation portion calculates the electromagnetic field of the numerical solution applying portion and the connecting portion by a numerical calculation using Maxwell's equations, Fourier transforms the calculated electromagnetic field of the connecting portion into a plane wave expressed by a wavenumber vector, sets the transformed plane wave as an initial value, calculates the a wavenumber space electromagnetic field by an analytic solution of Helmholtz's equation, when the plane wave propagates the analytic solution applying portion in the propagation direction, and calculates the electromagnetic field of the analytic solution applying portion by inverse Fourier-transforming the wavenumber space electromagnetic field.

## Claims

### Claim 1

A calculation device, comprising:
a calculation portion that divides a sample into a plurality of cells, and calculates an electromagnetic field of the sample by calculating an electromagnetic field of each cell based on a physical property value associated with the cell, wherein the sample includes a numerical solution applying portion, a connecting portion and an analytic solution applying portion that are sequentially arranged in a propagation direction of incident light,
wherein the calculation portion
calculates the electromagnetic field of the numerical solution applying portion and the connecting portion by a numerical calculation that uses Maxwell's equations,
Fourier transforms the calculated electromagnetic field of the connecting portion into a plane wave expressed by a wavenumber vector,
sets the plane wave of the connecting portion as an initial value, and calculates a wavenumber space electromagnetic field of the analytic solution applying portion by using Helmholtz's equation, when the plane wave propagates the analytic solution applying portion in the propagation direction, and
calculates the electromagnetic field of the analytic solution applying portion by inverse Fourier-transforming the wavenumber space electromagnetic field of the calculated analytic solution applying portion.

### Claim 2 (depends on 1)

The calculation device of claim 1, wherein in the analytic solution applying portion, the calculation portion calculates one of an electric field, a magnetic field, or both the electric field and the magnetic field, depending on a predetermined purpose.

### Claim 3 (depends on 1)

The calculation device of claim 1, wherein in the analytic solution applying portion, the calculation portion Fourier-transforms two of three components of the electromagnetic field, and calculates a remaining component from transverse wave conditions of electromagnetic waves.

### Claim 4 (depends on 1)

The calculation device of claim 1, wherein in the analytic solution applying portion, the calculation portion calculates the electromagnetic field in one of a first portion that includes a predetermined plane orthogonal to the propagation direction or a second portion sandwiched by two predetermined planes orthogonal to the propagation direction.

### Claim 5 (depends on 1)

The calculation device of claim 1, wherein the calculation portion determines the numerical solution applying portion, the connecting portion and the analytic solution applying portion, by determining whether a complex refractive index of the cell is within a constant range in a direction opposite to the propagation direction.

### Claim 6 (depends on 1)

The calculation device of claim 1, wherein the calculation portion calculates the electromagnetic field of the analytic solution applying portion by expanding the electromagnetic field of the connecting portion into the analytic solution applying portion by using a symmetric boundary condition and an anti-symmetric boundary condition.

### Claim 7 (depends on 1)

The calculation device of claim 1, wherein
the calculation device further comprises:
a storage device that stores data of the electromagnetic fields of a plurality of numeral solution applying portions and a plurality of analytic solution applying portions, for a sample that includes a plurality of the numeral solution applying portions and a plurality of the analytic solution applying portions.

### Claim 8 (depends on 1)

The calculation device of claim 1, wherein in the numeral solution applying portion and the analytic solution applying portion, a complex refractive index of the cell is within a constant range.

### Claim 9 (depends on 1)

The calculation device of claim 1, wherein, for a sample that includes a substrate and an element formed on the substrate, the calculation portion determines
the analytic solution applying portion as including the substrate,
the numerical solution applying portion as including the element, and
the connecting portion as including a portion in the substrate to which the element is connected.

### Claim 10 (depends on 1)

The calculation device of claim 1, wherein the numerical calculation uses at least one of an FDTD method, an FEM method, a BEM method, a CIP method, an FIT method, or a method of solving Maxwell's equations for a model in which a material is discretized with a grid.

### Claim 11

A calculation device for calculating an electromagnetic field of a sample having an analytic solution applying portion including a substrate, a numerical solution applying portion including at least one element, and a connecting portion including a portion in the substrate to which the at least one element is connected, comprising:
a calculation portion configured to divide each of the numerical solution applying portion, the connecting portion and the analytic solution applying portion into a plurality of cells,
wherein the calculation portion calculates the electromagnetic field of each of cells included in the numerical solution applying portion and the connecting portion by a numerical calculation that uses Maxwell's equations, and
wherein the calculation portion calculates the electromagnetic field of each of cells included in the analytic solution applying portion by an analytic solution that uses Helmholtz's equation.

### Claim 12 (depends on 11)

The calculation device of claim 11, wherein the calculation portion calculates the electromagnetic field of each of the plurality of cells based on a physical property value associated with each of the plurality of cells.

### Claim 13 (depends on 11)

The calculation device of claim 11, wherein the numerical calculation uses at least one of an FDTD method, an FEM method, a BEM method, a CIP method, an FIT method, or a method of solving Maxwell's equations for a model in which a material is discretized with a grid.

### Claim 14 (depends on 11)

The calculation device of claim 11, wherein the calculation portion transforms the electromagnetic field of the connecting portion into a plane wave expressed by a wavenumber vector by Fourier-transforming the electromagnetic field of the connecting portion, and
the calculation portion calculates the analytic solution in wavenumber space by using Helmholtz's equation in which the plane wave of the connecting portion is set as an initial value.

### Claim 15 (depends on 14)

The calculation device of claim 14, wherein the calculation portion calculates the electromagnetic field for each of the cells included in the analytic solution applying portion, by using the analytic solution in wavenumber space.

### Claim 16 (depends on 15)

The calculation device of claim 15, wherein the calculation portion calculates the electromagnetic field for each of the cells included in the analytic solution applying portion, by inverse Fourier-transforming the analytic solution in wavenumber space.

### Claim 17 (depends on 11)

The calculation device of claim 11, wherein the calculation portion determines a portion in which a complex refractive index is within a constant range as the analytic solution applying portion,
wherein the calculation portion determines a portion in which a complex refractive index is out of the constant range as the connecting portion, and
wherein the calculation portion determines a portion in a direction opposite to the connecting portion as the numerical solution applying portion.

### Claim 18 (depends on 17)

The calculation device of claim 17, wherein the calculation portion determines the analytic solution applying portion, the connecting portion and the numerical solution applying portion in a direction opposite to a propagation direction of an incident light being incident on the sample.

### Claim 19 (depends on 11)

The calculation device of claim 11, wherein, in the numerical solution applying portion, the calculation portion calculates the electromagnetic field of the numerical solution applying portion by using a symmetric boundary condition and an anti-symmetric boundary condition, when both a structure of the sample and an intensity of an incident light being incident on the sample are symmetric with respect to a propagation direction of the incident light.

### Claim 20 (depends on 11)

The calculation device of claim 11, wherein, in the analytic solution applying portion, the calculation portion calculates the electromagnetic field of the analytic solution applying portion by dividing a plane perpendicular to a direction of a propagation of an incident light being incident on the sample into first to fourth quadrants and by inverting and copying an electromagnetic field calculated in the first quadrant.
