# US 2024/0201119 A1 · Sensor and sensor system > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2024/0201119 A1 - Document ID: US20240201119A1 - Status: Published application - Kind: A1 - Application number: 18/365,433 - Filed: 2023-08-04 - Published: 2024-06-20 - Earliest claimed: 2022-12-14 - Assignees: Kabushiki Kaisha Toshiba - Applicants: Kabushiki Kaisha Toshiba - Inventors: Yumi HAYASHI - Web page: https://patentgrep.com/patent/US20240201119A1 ## CPC - G01N 27/226: {Construction of measuring vessels; Electrodes therefor} - G01N 33/005: {H2} - G01N 27/227: {Sensors changing capacitance upon adsorption or absorption of fluid components, e.g. electrolyte-insulator-semiconductor sensors, MOS capacitors (G01N27/225 takes precedence)} - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) ## Abstract According to one embodiment, a sensor includes a base, a base including a first region and a second region, a fixed electrode fixed to the first region, a first fixed portion fixed to the second region, a first support portion, and a movable portion. The first support portion is connected to the first fixed portion. The first support portion includes a first support layer and a first layer fixed to the first support layer. The first layer includes at least one metal selected from the group consisting of Pt, Pd and Ti, and oxygen. The movable portion is supported by the first support portion. A first gap is provided between the fixed electrode and the movable portion. ## Claims ### Claim 1 A sensor, comprising: a base including a first region and a second region; a fixed electrode fixed to the first region; a first fixed portion fixed to the second region; a first support portion connected to the first fixed portion, the first support portion including a first support layer and a first layer fixed to the first support layer, the first layer including at least one metal selected from the group consisting of Pt, Pd and Ti, and oxygen; and a movable portion supported by the first support portion, a first gap being provided between the fixed electrode and the movable portion. ### Claim 2 (depends on 1) The sensor according to claim 1, wherein the first layer is configured to be reduced by a detection target gas around the first layer. ### Claim 3 (depends on 2) The sensor according to claim 2, wherein the detection target gas includes hydrogen. ### Claim 4 (depends on 1) The sensor according to claim 1, wherein a concentration of the detection target gas in a first state is higher than a concentration of the detection target gas in a second state, and a first distance between the fixed electrode and the movable portion in the first state is longer than a second distance between the fixed electrode and the movable portion in the second state. ### Claim 5 (depends on 1) The sensor according to claim 1, wherein a concentration of the detection target gas in a first state is higher than a concentration of the detection target gas in a second state, and a first volume of the first layer in the first state is smaller than a second volume of the first layer in the second state. ### Claim 6 (depends on 1) The sensor according to claim 1, wherein a concentration of the detection target gas in a first state is higher than a concentration of the detection target gas in a second state, and a first electrical capacitance between the fixed electrode and the movable portion in the first state is smaller than a second electrical capacitance between the fixed electrode and the movable portion in the second state. ### Claim 7 (depends on 6) The sensor according to claim 6, further comprising: a controller configured to detect the first electrical capacitance and the second electrical capacitance. ### Claim 8 (depends on 1) The sensor according to claim 1, wherein the first layer includes an oxide of the metal. ### Claim 9 (depends on 1) The sensor according to claim 1, wherein the first layer includes a bond between the metal and oxygen. ### Claim 10 (depends on 1) The sensor according to claim 1, wherein the first layer includes a first face and a first portion, the first portion is between the first support layer and the first face, the first portion is a center of the first layer in a first direction from the first support layer to the first face, and a ratio of an absolute value of a difference between a first portion concentration of oxygen in the first portion and a first face concentration of oxygen in the first face to the first partial concentration is not less than 0.1 and not more than 10. ### Claim 11 (depends on 1) The sensor according to claim 1, wherein a thickness of the first layer is not less than 1 nm and not more than 1 μm. ### Claim 12 (depends on 11) The sensor according to claim 11, wherein a thickness of the first support layer is not less than 10 nm and not more than 10 μm. ### Claim 13 (depends on 1) The sensor according to claim 1, wherein the first support portion further includes a first conductive member, and a temperature of the first supporting portion can be increased by a current flowing through the first conductive member. ### Claim 14 (depends on 1) The sensor according to claim 1, wherein the first support layer includes silicon oxide. ### Claim 15 (depends on 1) The sensor according to claim 1, wherein the first support layer is provided between the base and the first layer, and a second gap is provided between the base and the first support layer. ### Claim 16 (depends on 15) The sensor according to claim 15, further comprising: a first connecting portion, a part of the first connecting portion being connected to the first support portion, another part of the first connecting portion being connected to the movable portion, and a third gap being provided between the base and the first connecting portion. ### Claim 17 (depends on 16) The sensor according to claim 16, wherein the first connecting portion has a meandering structure. ### Claim 18 (depends on 1) The sensor according to claim 1, further comprising: a second fixed portion; and a second support portion, the base further including a third region, the first region being between the second region and the third region, the second fixed portion being fixed to the third region, the second support portion being connected to the second fixed portion, the second support portion including a second support layer and a second layer fixed to the second support layer, the second layer including at least one metal selected from the group consisting of Pt, Pd and Ti, and oxygen, and the movable portion being provided between the first support portion and the second support portion and being further supported by the second support portion. ### Claim 19 (depends on 18) The sensor according to claim 18, further comprising: a second connecting portion, a part of the second connecting portion being connected to the second support portion, another part of the second connecting portion being connected to the movable portion, and a gap being provided between the base and the second connecting portion. ### Claim 20 (depends on 19) The sensor according to claim 19, wherein the second connecting portion has a meandering structure.