# US 2024/0201113 A1 · Particle analyzing device, and particle analyzing method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2024/0201113 A1 - Document ID: US20240201113A1 - Status: Published application - Kind: A1 - Application number: 18/288,042 - Filed: 2021-05-26 - Published: 2024-06-20 - Earliest claimed: 2021-05-26 - Assignees: Hitachi High-Tech Corporation - Applicants: Hitachi High-Tech Corporation - Inventors: Akiko HISADA; Yuusuke OOMINAMI; Erino MATSUMOTO - Web page: https://patentgrep.com/patent/US20240201113A1 ## CPC - G01N 23/2251: using incident electron beams, e.g. scanning electron microscopy [SEM] - G01N 2223/401: image processing - H01J 37/20: Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support - H01J 37/28: with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} - Y02E 60/10: Energy storage using batteries - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) - Y02E: REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION ## Abstract In a particle analyzing device for analyzing a predetermined particle to be analyzed, placed on an instrument, with an electron microscope, the particle analyzing device acquires a first standard value and a second standard value regarding brightness in an electron microscope image, the particle analyzing device acquires an electron microscope image and a signal profile generated by irradiating the instrument and the particle with an electron beam, and the particle analyzing device adjusts brightness of the electron microscope image based on the first standard value, the second standard value, and the signal profile. ## Claims ### Claim 1 A particle analyzing device for analyzing a predetermined particle to be analyzed, placed on an instrument, with an electron microscope, wherein the particle analyzing device acquires a first standard value and a second standard value regarding brightness in an electron microscope image, the particle analyzing device acquires an electron microscope image and a signal profile generated by irradiating the instrument and the particle with an electron beam, the particle analyzing device adjusts brightness of the electron microscope image based on the first standard value, the second standard value, and the signal profile, the instrument includes a first region having different brightness from the particle and a second region having different brightness from the particle and the first region when observed with the electron microscope, the first standard value is a value determined based on brightness of the first region, and the second standard value is a value determined based on brightness of the second region. ### Claim 2 (depends on 1) The particle analyzing device according to claim 1, wherein the particle analyzing device acquires a type of a particle and a type of an instrument, and acquires the first standard value and the second standard value based on the type of the particle and the type of the instrument. ### Claim 3 (canceled) ### Claim 4 (depends on 1) The particle analyzing device according to claim 1, wherein a material constituting the first region is different from a material constituting the second region. ### Claim 5 (depends on 1) The particle analyzing device according to claim 1, wherein the first region and the second region are portions different from each other in a three-dimensional structure of the instrument. ### Claim 6 (depends on 1) The particle analyzing device according to claim 1, wherein the particle is a stained particle. ### Claim 7 (depends on 1) The particle analyzing device according to claim 1, further comprising: an electron gun that irradiates the instrument and the particle with an electron beam; a detector that detects electrons generated by irradiation with the electron beam; and an image output unit that outputs an electron microscope image whose brightness has been adjusted. ### Claim 8 (depends on 7) The particle analyzing device according to claim 7, wherein brightness of the electron microscope image is adjusted offline. ### Claim 9 (depends on 1) The particle analyzing device according to claim 1, wherein the instrument includes a through hole penetrating the instrument, and a diameter of the through hole is smaller than a minor diameter of the particle. ### Claim 10 (depends on 1) The particle analyzing device according to claim 1, wherein the particle analyzing device outputs the signal profile, the particle analyzing device acquires a first target value and a second target value, the particle analyzing device determines a conversion formula for converting the first standard value into the first target value and converting the second standard value into the second target value in the signal profile, and the particle analyzing device adjusts brightness of the electron microscope image by applying the conversion formula to the brightness of the electron microscope image. ### Claim 11 A particle analyzing method for analyzing a predetermined particle to be analyzed, placed on an instrument, with an electron microscope, the particle analyzing method comprising: acquiring a first standard value and a second standard value regarding brightness in an electron microscope image; acquiring an electron microscope image and a signal profile generated by irradiating the instrument and the particle with an electron beam; and adjusting brightness of the electron microscope image based on the first standard value, the second standard value, and the signal profile, wherein the instrument includes a first region having different brightness from the particle and a second region having different brightness from the particle and the first region when observed with the electron microscope, the first standard value is a value determined based on brightness of the first region, and the second standard value is a value determined based on brightness of the second region.