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US 2024/0201112 A1Published application
System and method of operating an electron energy loss spectrometer
AssigneeGatan, Inc.
InventorsColin Geoffrey TREVOR, Melanie BARFELS
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Abstract
A system and method for compensating for chromatic aberration in a transmission electron microscope used with an electron energy level spectrometer is described. The method adjusts an electrostatic or magnetic lens located between an electron microscope and a bending magnet to focus the electron microscope beam at electron energy levels under observation.
Claims9
A system for electron energy loss spectroscopy comprising:
- an electron microscope,
- a bending magnet,
- an electrostatic or magnetic lens located at an entrance end of the bending magnet;
- a controller configured to adjust the electrostatic or magnetic lens to compensate for a change in position of a final crossover of the electron beam in the electron microscope.
1 more element
A method of compensating for chromatic aberration in an electron energy loss spectroscopy system comprising an electron microscope, a bending magnet, and a drift tube, the method comprising:
- setting the electron microscope to a camera length;
- setting a first energy offset via a drift tube voltage or bending magnet current;
- adjusting to a first setting a first electrostatic or magnetic lens located at an entry to the bending magnet for a first electron energy level to produce a focused spectrum at a detector;
- storing the first setting of the first electrostatic or magnetic lens together with the camera length and the first electron energy level;
- moving to a second offset via the drift tube voltage or bending magnet;
- and
- adjusting to a second setting the first electrostatic or magnetic lens located at the entry to the bending magnet for a second electron energy level to produce a focused spectrum at the detector.
4 more elements
Dependencies are inferred from the claim text.