# US 2024/0201078 A1 · Gas analysis device and laser light transmission mechanism > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2024/0201078 A1 - Document ID: US20240201078A1 - Status: Published application - Kind: A1 - Application number: 18/287,544 - Filed: 2022-03-16 - Published: 2024-06-20 - Earliest claimed: 2021-06-08 - Assignees: HORIBA STEC, Co., Ltd. - Applicants: HORIBA STEC, Co., Ltd. - Inventors: Motonobu TAKAHASHI; Takeshi AKAMATSU; Masahiro NAKANE; Kenji HARA; Kyoji SHIBUYA - Web page: https://patentgrep.com/patent/US20240201078A1 ## CPC - G01N 21/3504: for analysing gases, e.g. multi-gas analysis - G01N 21/0303: {Optical path conditioning in cuvettes, e.g. windows; adapted optical elements or systems; path modifying or adjustment (G01N21/031 - G01N21/15 take precedence)} - G01N 21/031: {Multipass arrangements} - G01N 21/0332: {with temperature control (control of temperature G05D23/00; cryostats F17C3/08)} - G01N 21/33: using ultraviolet light (G01N21/39 takes precedence) - G01N 21/39: using tunable lasers - G01N 2021/3595: {using FTIR} - G01N 2201/0233: Gas purge - G01N 2201/0633: Directed, collimated illumination - G01N 2201/0636: Reflectors - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) ## Abstract In order to provide a more practical gas analysis device than that having conventionally been, while keeping the laser source and the photodetector separated from the gas cell, thereby preventing exposure to a high temperature, the gas analysis device includes: a gas cell; a laser source or a photodetector separated from the gas cell; and a laser light transmission mechanism provided between the gas cell and the laser source or the photodetector. The laser light transmission mechanism includes one or a plurality of tubular members, and an inner space of the one or the plurality of tubular members provides a light path for the laser light. ## Claims ### Claim 1 A gas analysis device comprising: a gas cell; a laser source or a photodetector separated from the gas cell; and a laser light transmission mechanism provided between the gas cell and the laser source or the photodetector, wherein the laser light transmission mechanism includes one or a plurality of tubular members, and an inner space of the one or the plurality of tubular members provides a light path for laser light. ### Claim 2 (depends on 1) The gas analysis device according to claim 1, wherein the gas cell is heated by a heating mechanism. ### Claim 3 (depends on 1) The gas analysis device according to claim 1, wherein the laser source or the photodetector separated from the gas cell is separated from a pipe connected to the gas cell. ### Claim 4 (depends on 1) The gas analysis device according to claim 1, wherein the gas cell is provided inside a casing of a semiconductor manufacturing device. ### Claim 5 (depends on 1) The gas analysis device according to claim 1, wherein the light path formed by the plurality of tubular members coupled to each other has at least one bend. ### Claim 6 (depends on 5) The gas analysis device according to claim 5, wherein the laser light transmission mechanism includes: a coupling mechanism interposed between the tubular members that are adjacent to each other, and coupling the tubular members; and a reflection mirror provided inside the coupling mechanism. ### Claim 7 (depends on 6) The gas analysis device according to claim 6, wherein the coupling mechanism has a pair of attachments having the same shape and attached to respective ends of the tubular members that are adjacent to each other, and the reflection mirror is provided inside each attachment included in the pair of attachments. ### Claim 8 (depends on 1) The gas analysis device according to claim 1, wherein the laser light transmission mechanism includes an optical fiber provided in the inner space of the tubular member, and forming the light path. ### Claim 9 (depends on 1) The gas analysis device according to claim 1, wherein both the laser source and the photodetector are separated from the gas cell, and a plurality of the laser light transmission mechanisms are provided between the gas cell and the laser source and between the gas cell and the photodetector, respectively. ### Claim 10 (depends on 1) The gas analysis device according to claim 1, wherein one or both of the laser source and the photodetector are housed inside the casing. ### Claim 11 (depends on 1) The gas analysis device according to claim 1, wherein temperature-controlled gas is circulated through or is sealed in the inner space of the tubular member. ### Claim 12 (depends on 1) The gas analysis device according to claim 1, wherein a purge gas not containing the component to be measured is circulated through the inner space of the tubular member. ### Claim 13 (depends on 1) The gas analysis device according to claim 1, wherein the inner space of the tubular member is in a vacuum state. ### Claim 14 (depends on 1) The gas analysis device according to claim 1, further comprising a beam splitter that splits laser light from the laser source into a plurality of light paths, wherein the plurality of tubular members form the plurality of light paths, respectively. ### Claim 15 A laser light transmission mechanism that is used in a gas analysis device including a gas cell and a laser source or a photodetector that is separated from the gas cell, and that is provided between the gas cell and the laser source or the photodetector, wherein the laser light transmission mechanism includes one or a plurality of tubular members, and an inner space of the one or the plurality of tubular members provides a light path for laser light.