# US 2024/0199409 A1 · Micromechanical z-acceleration sensor

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- Number: US 2024/0199409 A1
- Document ID: US20240199409A1
- Status: Published application
- Kind: A1
- Application number: 18/538,538
- Filed: 2023-12-13
- Published: 2024-06-20
- Earliest claimed: 2022-12-19
- Assignees: Robert Bosch GmbH
- Applicants: Robert Bosch GmbH
- Inventors: Cristian Nagel
- Web page: https://patentgrep.com/patent/US20240199409A1

## CPC

- B81B 3/0081: {Thermal properties}
- B81B 2201/0235: Accelerometers
- B81B 2203/0181: See-saws
- B81B 2203/0353: Holes
- B81B 2203/053: Translation according to an axis perpendicular to the substrate
- B81B 2203/058: Rotation out of a plane parallel to the substrate
- B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00)

## Abstract

A micromechanical z-acceleration sensor. The sensor has a substrate with a main extension plane, and a micromechanical rocker which is arranged parallel to the extension plane above the substrate and can be tilted in a first direction z perpendicular to the extension plane, wherein the rocker in a first partial region: has first perforations, which extend through the rocker in the first direction z, with a first cross-section parallel to the main extension plane with a first aspect ratio of at least 1:1; and has second perforations, which extend through the rocker in the first direction z, with a second cross-section with a second aspect ratio of a longer side to a shorter side, wherein the first aspect ratio is smaller than the second aspect ratio. A first perforation and a second perforation are arranged alternately next to one another in a repeating pattern.

## Claims

### Claim 1

A micromechanical z-acceleration sensor, comprising:
a substrate with a main extension plane; and
a micromechanical rocker which is arranged parallel to the main extension plane above the substrate and can be tilted in a first direction perpendicular to the main extension plane, wherein the rocker in a first partial region includes:
first perforations, which extend through the rocker in the first direction, with a first cross-section parallel to the main extension plane with a first aspect ratio of at least 1:1, and
second perforations, which extend through the rocker in the first direction, with a second cross-section with a second aspect ratio of a longer side to a shorter side,
wherein the first aspect ratio is smaller than the second aspect ratio,
wherein a first perforation and a second perforation are arranged alternately next to one another in a repeating pattern.

### Claim 2 (depends on 1)

The micromechanical z-acceleration sensor according to claim 1, wherein the first perforations are arranged in a grid with a grid spacing, and the second perforations are arranged in intermediate spaces of the grid.

### Claim 3 (depends on 1)

The micromechanical z-acceleration sensor according to claim 1, wherein the first partial region has a smaller thickness than a second partial region of the rocker.

### Claim 4 (depends on 2)

The micromechanical z-acceleration sensor according to claim 2, wherein the grid has a grid spacing of the first perforations of 7 to 15 μm, the first perforations have a cross-section of 4×3 μm to 8×8 μm, and the second perforations have a longer side of 3 to 10 μm in length and a shorter side of 0.4 to 1 μm in width.