# US 2024/0199346 A1 · Article transferring apparatus and article transferring method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2024/0199346 A1 - Document ID: US20240199346A1 - Status: Published application - Kind: A1 - Application number: 18/543,328 - Filed: 2023-12-18 - Published: 2024-06-20 - Earliest claimed: 2022-12-19 - Assignees: Semes Co., Ltd. - Applicants: Semes Co., Ltd. - Inventors: Kyu Hyung PARK - Web page: https://patentgrep.com/patent/US20240199346A1 ## CPC - B65G 47/53: between conveyors which cross one another - H10P 72/3221: {Overhead conveying} - B65G 17/20: comprising load-carriers suspended from overhead traction chains - B65G 19/025: {for suspended articles} - H10P 72/3218: {Conveying cassettes, containers or carriers} - H10P 72/3222: {Loading to or unloading from a conveyor} - H10P 72/3404: {Storage means} - B65G: TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS (packaging B65B; handling thin or filamentary materials, e.g. paper sheets or thread, B65H; cranes B66C; portable mobile or lifting or hauling appliances, e.g. hoists, B66D; devices for lifting or lowering goods for loading or unloading purposes, e.g. fork-lift trucks, B66F9/00; emptying bottles, jars, casks, barrels or similar containers, not otherwise provided for, B67C9/00; delivering or transferring liquids B67D; filling or discharging vessels for liquefied, solidified or compressed gases F17C; pipe-line systems for fluids F17D) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract Disclosed is an article transferring apparatus, including: a main rail provided along a ceiling of a substrate manufacturing line in which process modules for treating a substrate are arranged; a main transferring vehicle moving along the main rail and for loading and unloading a container containing a substrate to and from the process module; a sub-rail installed on a ceiling corresponding to an upper portion of the process module; and a sub-transferring vehicle moving along the sub-rail and dedicated to loading and unloading a container between a first loading part and a second loading part of the process module. ## Claims ### Claim 1 An article transferring apparatus, comprising: a main rail provided along a ceiling of a substrate manufacturing line in which process modules for treating a substrate are arranged; a main transferring vehicle moving along the main rail and for loading and unloading a container containing a substrate to and from the process module; a sub-rail installed on a ceiling corresponding to an upper portion of the process module; and a sub-transferring vehicle moving along the sub-rail and dedicated to loading and unloading a container between a first loading part and a second loading part of the process module. ### Claim 2 (depends on 1) The article transferring apparatus of claim 1, further comprising: a control unit for outputting a transfer command of the container to the main transferring vehicle and the sub-transferring vehicle, wherein the control unit stops transferring the container of the sub-transferring vehicle when the main transferring vehicle loads or unloads the container to or from the first loading part or the second loading part to prevent a collision between the main transferring vehicle and the sub-transferring vehicle. ### Claim 3 (depends on 1) The article transferring apparatus of claim 1, wherein the first loading part is loaded with a container containing a substrate that is not process-treated, and the second loading part is loaded with a container containing a substrate that has been process-treated. ### Claim 4 (depends on 3) The article transferring apparatus of claim 3, wherein the sub-transferring vehicle transfers the container from the first loading part to the second loading part, and the container transferred by the sub-transferring vehicle is in an empty state in which the substrate that is not process-treated has been inserted into the process module. ### Claim 5 (depends on 4) The article transferring apparatus of claim 4, wherein the main transferring vehicle loads the container containing the substrate that is not process-treated to the first loading part, and unloads the container containing the substrate that has been process-treated from the second loading part. ### Claim 6 (depends on 4) The article transferring apparatus of claim 4, wherein the sub-transferring vehicle further includes a detection sensor for detecting the main transferring vehicle. ### Claim 7 (depends on 4) The article transferring apparatus of claim 4, wherein the sub-rail is disposed to pass through upper portions of the first loading part and the second loading part. ### Claim 8 (depends on 7) The article transferring apparatus of claim 7, wherein the sub-rail is provided to be parallel with the main rail. ### Claim 9 (depends on 4) The article transferring apparatus of claim 4, wherein the main transferring vehicle includes: a vehicle moving along the main rail; a main body connected to the vehicle, and providing an interior space in which a container is located; a hoist unit provided in the main body, and for hoisting a belt by winding or unwinding the belt; a hand unit fixed to one end of the belt, and for gripping a container; and a slide unit for moving the hoist unit in a horizontal direction. ### Claim 10 (depends on 4) The article transferring apparatus of claim 4, wherein the sub-transferring vehicle includes: a moving body moving along the sub-rail; a hoist unit for hoisting a belt by winding or unwinding the belt; and a hand unit fixed at one end of the belt, and for gripping the container. ### Claim 11 (depends on 4) The article transferring apparatus of claim 4, wherein in the process module, the first loading part and the second loading part are provided to be parallel with the sub-rail, and the sub-rail is provided on the at least one process module. ### Claim at position 12 -18. (canceled) ### Claim 19 An article transferring apparatus, comprising: a main rail provided along a ceiling of a substrate manufacturing line in which process modules for treating a substrate are arranged; a main transferring vehicle moving along the main rail and loading and unloading a container containing a substrate to and from the process module; a sub-rail installed on a ceiling corresponding to an upper portion of the process module; and a sub-transferring vehicle moving along the sub-rail and dedicated to loading and unloading a container between a first loading part and a second loading part of the process module; and a control unit for outputting a transfer command of the container to the main transferring vehicle and the sub-transferring vehicle, wherein the control unit stops transferring the container of the sub-transferring vehicle when the main transferring vehicle loads or unloads the container to or from the first loading part or the second loading part to prevent a collision between the main transferring vehicle and the sub-transferring vehicle, the main transferring vehicle loads a container containing a substrate that is not process-treated to the first loading part, and unloads a container containing a substrate that has been process-treated from the second loading part, the sub-transferring vehicle transfers the container from the first loading part to the second loading part, and the container transferred by the sub-transferring vehicle is in an empty state in which the substrate that is not process-treated has been inserted into the process module. ### Claim 20 (depends on 19) The article transferring apparatus of claim 19, wherein in the process module, the first loading part and the second loading part are provided to be parallel with the sub-rail, and the sub-rail is disposed in upper portions of the first loading part and the second loading part on the at least one process module, and is provided to be parallel with the main rail.