Liquid ejecting apparatus, imprint apparatus, and control method
AssigneeCanon Kabushiki Kaisha
InventorsTAKAHIRO HOSOKAWA, HISASHI NAMBA, NORIYASU HASEGAWA
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AssigneeCanon Kabushiki Kaisha
InventorsTAKAHIRO HOSOKAWA, HISASHI NAMBA, NORIYASU HASEGAWA
Estimating the term…
A liquid ejecting apparatus includes an ejection unit including an ejection surface in which an orifice through which a liquid is ejected is open, an oscillating element provided with the orifice, a retention member arranged opposite the ejection surface and configured to retain a liquid between the retention member and the ejection surface, a detection unit configured to detect an oscillation characteristic of the oscillating element, and a control unit configured to, in a case of cleaning the orifice, drive the oscillating element at a drive period based on a detection result of the detection unit in a state in which the liquid is retained between the retention member and the ejection surface.
A liquid ejecting apparatus, comprising:
An imprint apparatus comprising a liquid ejecting apparatus and operable to perform an imprint process on a substrate by ejecting liquid from the liquid ejecting apparatus,
A method of controlling a liquid ejecting apparatus including:
Dependencies are inferred from the claim text.