# US 2024/0198366 A1 · Apparatus and method for measuring flow conductance of showerhead assembly

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- Number: US 2024/0198366 A1
- Document ID: US20240198366A1
- Status: Published application
- Kind: A1
- Application number: 18/540,419
- Filed: 2023-12-14
- Published: 2024-06-20
- Earliest claimed: 2022-12-16
- Assignees: ASM IP Holding B.V.
- Applicants: ASM IP Holding B.V.
- Inventors: Dinkar Nandwana; Allen D'Ambra; Dinh Tran; Chen Ni; Gary Paulsen; Michael Samy Boulos Hanna Elkomos
- Web page: https://patentgrep.com/patent/US20240198366A1

## CPC

- B05B 1/005: {Nozzles or other outlets specially adapted for discharging one or more gases}
- C23C 16/45565: {Shower nozzles}
- B05B 1/182: {characterised by their outlet openings or elements; Mounting arrangements therefor}
- G01F 9/001: {with electric, electro-mechanic or electronic means (G01F9/008 and G01F9/02 take precedence)}
- H10P 95/00: Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
- B05B: SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES (spray-mixers with nozzles B01F25/72; processes for applying liquids or other fluent materials to surfaces by spraying B05D)
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- G01F: MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

Methods and apparatuses for measuring a flow conductance of a showerhead assembly are described. For example, a showerhead assembly may be seated in a housing. A gas source may be coupled to an intake port of the showerhead assembly and supply gas to the showerhead assembly via the intake port. A pressure controller may be coupled between the gas source and the showerhead assembly. The pressure controller may measure a flow throughput of the gas that passes through the pressure controller. The pressure controller may maintain the gas being supplied to the showerhead assembly at a first pressure value. A pressure transducer coupled to an exhaust port of the showerhead assembly may measure a second pressure value. A controller may determine a flow conductance of the showerhead assembly based on the flow throughput and the first and second pressure values.

## Claims

### Claim 1

A system comprising:
a housing;
a showerhead assembly seated in the housing, the showerhead assembly comprising an intake port and an exhaust port;
a gas source coupled to the intake port of the showerhead assembly, wherein the gas source is configured to supply gas to the showerhead assembly via the intake port;
a pressure controller coupled between the gas source and the showerhead assembly, wherein the pressure controller is configured to measure a flow throughput of the gas that passes through the pressure controller;
a pressure transducer coupled to the exhaust port of the showerhead assembly; and
a controller configured to:
cause the pressure controller to maintain the gas being supplied from the gas source to the showerhead assembly at a first pressure value;
receive, from the pressure transducer, a second pressure value; and
determine, based on the flow throughput, the first pressure value, and the second pressure value, a flow conductance of the showerhead assembly.

### Claim 2 (depends on 1)

The system of claim 1, wherein the flow conductance is a first flow conductance, wherein the flow throughput is a first flow throughput, and
wherein the controller is further configured to:
cause the pressure controller to maintain the gas being supplied from the gas source to the showerhead assembly at a third pressure value;
receive, from the pressure controller, a second flow throughput;
receive, from the pressure transducer, a fourth pressure value;
determine, based on the second flow throughput, the third pressure value, and the fourth pressure value, a second flow conductance of the showerhead assembly; and
generate, based on the first flow conductance and the second flow conductance, a flow characteristic profile of the showerhead assembly.

### Claim 3 (depends on 1)

The system of claim 1, wherein the showerhead assembly further comprises:
a showerhead comprising a plurality of apertures;
a transfer tube coupled between the intake port and the showerhead; and
a blank-off plate coupled to the showerhead to create a seal around the showerhead.

### Claim 4 (depends on 1)

The system of claim 1, wherein the gas source is coupled to the intake port via at least one of a manual valve, a pressure regulator, a filter, or a second pressure transducer.

### Claim 5 (depends on 1)

The system of claim 1, wherein the pressure transducer comprises a first pressure transducer and a second pressure transducer, wherein the pressure transducer and the second pressure transducer have different measurement ranges and different measurement resolutions.

### Claim 6 (depends on 1)

The system of claim 1, wherein the controller is configured to determine the flow conductance based on a formula, C=Q/(P1−P2), wherein C is the flow conductance, Q is the flow throughput, P1is the first pressure value, and P2 is the second pressure value.

### Claim 7 (depends on 1)

The system of claim 1, wherein the gas is an inert gas.

### Claim 8 (depends on 1)

The system of claim 1, wherein the gas is at least one of nitrogen, ammonia, silane, hydrogen, argon, or krypton.

### Claim 9

A flow conductance measuring device comprising:
a pressure controller configured to:
supply intake gas to a showerhead assembly at a first pressure value; and
measure a flow throughput of the supplied intake gas;
a pressure transducer configured to measure a second pressure value of an exhaust gas, which comprises the intake gas being expelled from the showerhead assembly;
a controller configured to determine a flow conductance of the showerhead assembly based on the flow throughput, the first pressure value, and the second pressure value.

### Claim 10 (depends on 9)

The flow conductance measuring device of claim 9, wherein the intake gas is a first intake gas, wherein the exhaust gas is a first exhaust gas, wherein the flow throughput is a first flow throughput, wherein the flow conductance is a first flow conductance,
wherein the pressure controller is configured to:
supply a second intake gas to the showerhead assembly at a third pressure value; and
measure a second flow throughput of the supplied second intake gas,
wherein the pressure transducer is further configured to measure a fourth pressure value of a second exhaust gas, which is the second intake gas being expelled from the showerhead assembly, and
wherein the controller is further configured to:
determine a second flow conductance of the showerhead assembly based on the second flow throughput, the third pressure value, and the fourth pressure value; and
determine, based on the first flow conductance and the second flow conductance, a flow characteristic profile of the showerhead assembly.

### Claim 11 (depends on 9)

The flow conductance measuring device of claim 9, wherein the pressure controller is coupled to a gas source via at least one of a manual valve, a pressure regulator, a filter, or a second pressure transducer.

### Claim 12 (depends on 9)

The flow conductance measuring device of claim 9, wherein the pressure transducer comprises a first pressure transducer and a second pressure transducer, wherein the pressure transducer and the second pressure transducer have different measurement ranges and different measurement resolutions.

### Claim 13 (depends on 9)

The flow conductance measuring device of claim 9, wherein the controller is configured to determine the flow conductance based on a formula, C=Q/(P1−P2), wherein C is the flow conductance, Q is the flow throughput, P1 is the first pressure value, and P2 is the second pressure value.

### Claim 14 (depends on 9)

The flow conductance measuring device of claim 9, wherein the intake gas is an inert gas.

### Claim 15

A method comprising:
causing, by a controller, an intake gas to be supplied to a showerhead assembly via an intake conduit at a first pressure value;
receiving an indication of a flow throughput of the intake gas;
receiving an indication of a second pressure value, of an exhaust gas being expelled from the showerhead assembly, measured at an exhaust conduit coupled to the showerhead assembly; and
determining, based on the flow throughput, the first pressure value, and the second pressure value, a flow conductance of the showerhead assembly.

### Claim 16 (depends on 15)

The method of claim 15, further comprising:
based on the flow conductance failing to satisfy a threshold value, refurbishing the showerhead assembly.

### Claim 17 (depends on 15)

The method of claim 15, wherein the flow conductance is a first flow conductance, wherein the flow throughput is a first throughput, and
wherein the method further comprises:
causing, by the controller, the intake gas to be supplied to the showerhead assembly via the intake conduit at a third pressure value;
receiving an indication of a second flow throughput of the intake gas;
receiving an indication of a fourth pressure value, of the exhaust gas being expelled from the showerhead assembly, measured at the exhaust conduit;
determining, based on the second flow throughput, the third pressure value, and the fourth pressure value, a second flow conductance of the showerhead assembly;
outputting for display, based on the first flow conductance and the second flow conductance, a flow characteristic profile of the showerhead assembly.

### Claim 18 (depends on 15)

The method of claim 15, wherein the receiving the indication of the flow throughput of the intake gas comprises receiving the indication of the flow throughput of the intake gas from a flow controller coupled to the intake conduit, and wherein the receiving the indication of the second pressure value comprises receiving the indication of the second pressure value from a pressure transducer.

### Claim 19 (depends on 15)

The method of claim 15, wherein the causing the intake gas to be supplied to the showerhead assembly comprises:
sending, by the controller to a pressure controller, a command to maintain the intake gas in the intake conduit at the first pressure value.

### Claim 20 (depends on 15)

The method of claim 15, wherein the determining the flow conductance of the showerhead assembly comprises determine the flow conductance based on a formula, C=Q/(P1−P2), wherein C is the flow conductance, Q is the flow throughput, P1 is the first pressure value, and P2 is the second pressure value.