Integrated circuit device and electronic system including the same

An integrated circuit device, comprising:

• a semiconductor substrate;
• a plurality of conductive lines extending on the semiconductor substrate in a horizontal direction and overlapping each other in a vertical direction;
• a plurality of insulating layers between pairs of conductive lines of the plurality of conductive lines and extending in the horizontal direction;
• and
• a channel structure passing through the plurality of conductive lines and the plurality of insulating layers,
• wherein the channel structure includes:
• a core insulating layer,
• a channel layer on a side wall and a bottom surface of the core insulating layer,
• a gate insulating layer on an outer wall of the channel layer, and
• a high-k pattern and a ferroelectric pattern alternating in the vertical direction on an outer wall of the gate insulating layer.

An electronic system, comprising:

• a main substrate;
• an integrated circuit device on the main substrate;
• and
• a controller electrically connected to the integrated circuit device on the main substrate,
• wherein:
• the integrated circuit device includes:
• a semiconductor substrate;
• a plurality of conductive lines extending on the semiconductor substrate in a horizontal direction and overlapping each other in a vertical direction;
• a plurality of insulating layers between pairs of conductive lines of the plurality of conductive lines and extending in the horizontal direction;
• and
• a channel structure passing through the plurality of conductive lines and the plurality of insulating layers, and
• the channel structure includes:
• a core insulating layer,
• a channel layer on a side wall and a bottom surface of the core insulating layer,
• a gate insulating layer on an outer wall of the channel layer, and
• a ferroelectric layer on at least a portion of an outer wall of the gate insulating layer.