Connection assembly
AssigneeASML Netherlands B.V.
InventorIvo VANDERHALLEN
Life of this patent
Estimating the term…
Abstract
There is described a connection assembly (24) for a high-pressure liquid metal supply system used in an EUV light source comprising a monolithic block, wherein the monolithic block includes: at least one connection (21) for connecting to a reservoir (18,19) configured to hold liquid metal: interior passages (25) configured to fluidly connect the at least one connection with at least two liquid metal outlets/inlets (22, 23): at least two freeze valves (15,16,17) configured to block a passage by solidifying liquid metal therein. Also described is a liquid metal storage assembly including such a connection assembly, a lithography apparatus including such a liquid metal storage assembly or such a connection assembly, as well as the use of such assemblies or apparatus in a lithographic apparatus or method.
Claims15
1-15. (canceled)
An connection comprising:
- a monolithic block comprising:
- at least one connection configured to connect to a reservoir that is configured to hold liquid metal;
- interior passages configured to fluidly connect the at least one connection with at least two liquid metal outlets/inlets;
- and
- at least two freeze valves configured to block a passage by solidifying liquid metal therein.
Dependencies are inferred from the claim text.