Surface acoustic wave resonator device and method of manufacturing the same, filter

A method of manufacturing a surface acoustic wave resonator device, comprising:

• providing a piezoelectric substrate;
• forming an interdigital transducer on the piezoelectric substrate, wherein the interdigital transducer has an interdigital electrode region, and comprises a first interdigital electrode and a first interdigital electrode lead-out part connected to each other, and a second interdigital electrode and a second interdigital electrode lead-out part connected to each other;
• the first interdigital electrode and the second interdigital electrode are located in the interdigital electrode region, extending along a first direction and alternately arranged in a second direction, the first direction intersects the second direction;
• the first interdigital electrode lead-out part and the second interdigital electrode lead-out part are located on opposite sides of the interdigital electrode region in the first direction;
• forming a first intermediate layer on a side of the piezoelectric substrate to cover the interdigital transducer;
• and
• forming a first conductive structure and a second conductive structure on a side of the first intermediate layer away from the piezoelectric substrate, wherein the first conductive structure and the second conductive structure are spaced apart from each other in the first direction, and each of the first conductive structure and the second conductive structure is overlapped with end portions of the first interdigital electrode and the second interdigital electrode in a third direction perpendicular to a main surface of the piezoelectric substrate,
• wherein the first conductive structure is electrically connected to one of the first interdigital electrode and the second interdigital electrode, and the second conductive structure is electrically connected to the other one of the first interdigital electrode and the second interdigital electrode.