Acoustic resonator and manufacturing method thereof
AssigneeSpectron (Shenzhen) Technologies Co., Ltd
InventorsSongbin GONG, Gabriel Vidal ÁLVAREZ, Martino RAMOTTI
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Abstract
Discloses is an acoustic resonator and a manufacturing method thereof, which relate to the technical field of piezoelectric resonators. The manufacturing method of the acoustic resonator includes: forming a bottom laminated structure on a side of a substrate; forming a bottom electrode layer, a piezoelectric layer, and a top electrode layer on a side of the bottom laminated structure facing away from the substrate; and forming a frequency-temperature coefficient compensation layer on a side of the bottom electrode layer, the piezoelectric layer, and the top electrode layer facing away from the substrate.
Claims14
A manufacturing method of an acoustic resonator, comprising:
- forming a bottom laminated structure on a side of a substrate;
- forming a bottom electrode layer, a piezoelectric layer, and a top electrode layer on a side of the bottom laminated structure facing away from the substrate;
- and
- forming a frequency-temperature coefficient compensation layer on a side of the bottom electrode layer, the piezoelectric layer, and the top electrode layer facing away from the substrate;
- wherein the bottom electrode layer, the piezoelectric layer, the top electrode layer, and the frequency-temperature coefficient compensation layer form a top laminated structure, the top laminated structure has an overall phase length of a multiple of half a period, that is, the overall phase length of the top laminated structure is nπ, wherein n is a positive integer greater than or equal to 2.
An acoustic resonator, comprising:
- a substrate;
- a bottom laminated structure located on a side of the substrate;
- a bottom electrode layer, a piezoelectric layer, and a top electrode layer located on a side of the bottom laminated structure facing away from the substrate;
- and
- a frequency-temperature coefficient compensation layer located on a side of the bottom electrode layer, the piezoelectric layer, and the top electrode layer facing away from the substrate;
- wherein the bottom electrode layer, the piezoelectric layer, the top electrode layer, and the frequency-temperature coefficient compensation layer form a top laminated structure, the top laminated structure has an overall phase length of a multiple of half a period, that is, the overall phase length of the top laminated structure is nπ, wherein n is a positive integer greater than or equal to 2.
Dependencies are inferred from the claim text.