Electrostatic chuck
AssigneeKYOCERA Corporation
InventorKenichi AKABANE
Life of this patent
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Abstract
An electrostatic chuck includes a ceramic substrate, a base plate, and an embedded member. The ceramic substrate includes a first surface on which a to-be-treated object is placed, a second surface opposite to the first surface, and a first channel penetrating through the first surface and the second surface. The base plate is bonded to the second surface of the ceramic substrate and includes a through hole at least at a position corresponding to the first channel. The embedded member is located in the through hole and includes a porous body facing the first channel and a second channel communicating with the first channel via the porous body. The first channel and the second channel are located apart from each other in a plane perspective view.
Claims10
An electrostatic chuck comprising:
- a ceramic substrate comprising:
- a first surface on which a to-be-treated object is placed;
- a second surface opposite to the first surface;
- and
- a first channel penetrating through the first surface and the second surface;
- a base plate bonded to the second surface of the ceramic substrate and comprising a through hole at least at a position corresponding to the first channel;
- and
- an embedded member located in the through hole and comprising a porous body facing the first channel and a second channel communicating with the first channel via the porous body, the first channel and the second channel being located apart from each other in a plane perspective view.
Dependencies are inferred from the claim text.