Method of manufacturing optical detection element and optical detection element
AssigneeHamamatsu Photonics K.K.
InventorsKazutoshi NAKAJIMA, Wei DONG, Hiroyasu FUJIWARA
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AssigneeHamamatsu Photonics K.K.
InventorsKazutoshi NAKAJIMA, Wei DONG, Hiroyasu FUJIWARA
Estimating the term…
A method of manufacturing an optical detection element includes: a first process of forming an amorphous semiconductor layer on a support; a second process of forming a first metal layer on the semiconductor layer; a third process of carrying out a heat treatment so that the semiconductor layer is polycrystallized and the semiconductor layer and the first metal layer are interchanged with each other, thereby forming the first metal layer on the support and forming a polycrystalline photoelectric conversion layer on the first metal layer; and a fourth process of forming a second metal layer on the photoelectric conversion layer. In the fourth process, the second metal layer is formed so that a width of the second metal layer becomes a width with which surface plasmon resonance occurs due to incidence of light in a predetermined wavelength region.
A method of manufacturing an optical detection element, comprising:
An optical detection element, comprising:
Dependencies are inferred from the claim text.