Bonding apparatus, bonding method, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorKENICHIRO MORI
Life of this patent
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Abstract
The present invention provides a bonding apparatus for performing a bonding process of bonding, to one of a plurality of regions in a first object to be bonded, a second object to be bonded, comprising: a holder configured to hold the second object; a surface treatment device configured to perform a surface treatment which includes activating a surface state of a target bonding surface of the second object held by the holder; and a controller configured to, after the surface treatment is performed for the second object by the surface treatment device, control the bonding process such that the second object is bonded to one of the plurality of regions in a state in which the second object is held by the holder.
Claims13
A bonding apparatus for performing a bonding process of bonding, to one of a plurality of regions in a first object to be bonded, a second object to be bonded, comprising:
- a holder configured to hold the second object;
- a surface treatment device configured to perform a surface treatment which includes activating a surface state of a target bonding surface of the second object held by the holder;
- and
- a controller configured to, after the surface treatment is performed for the second object by the surface treatment device, control the bonding process such that the second object is bonded to one of the plurality of regions in a state in which the second object is held by the holder.
A bonding method of bonding, to one of a plurality of regions in a first object to be bonded, a second object to be bonded, comprising:
- causing a holder to hold the second object;
- performing a surface treatment which includes activating a surface state of a target bonding surface of the second object held by the holder;
- and
- after the performing the surface treatment, bonding the second object to one of the plurality of regions in a state in which the second object to be bonded is held by the holder.
Dependencies are inferred from the claim text.