Motion system with a configurable feedforward control

Abstract

A motion system includes a motion hardware system and a motion control system configured to control the movement of the motion hardware system. The hardware system includes a motion stage, a platform supporting the motion stage, and a machine frame resting on a ground surface. The platform includes a base and an active vibration isolation system arranged between the base and the machine frame. The active vibration isolation system includes actuators to provide together at least three degrees-of-freedom actuation of the base. The motion control system includes a feedforward control having a vibration isolation system controller for controlling the at least three DOF actuation of the active vibration isolation system to compensate, by exerting a counteracting force on the base, for expected reactions forces exerted by the motion stage on the base when operating. The feedforward control includes a memory for storing a string of characters defining the motion equations based on the topology of the motion stage, and a processing unit for processing the string of characters to compute the counteracting force.

Dependencies are inferred from the claim text.