Support unit, line storage unit, and transport system including the support unit

A transport system comprising:

• a transport cart;
• a rail providing a moving path for the transport cart;
• a frame unit including first horizontal parts, which are provided as horizontal bars, vertical parts, which extend upwardly from the first horizontal parts, second horizontal parts, which are parallel to the first horizontal parts and are provided at upper ends of the vertical parts, and intermediate parts, which connect the vertical parts or the second horizontal parts to the rail;
• and
• a support unit provided on the first horizontal parts and supporting transport items, which include a first storage having four first vertices formed on a bottom thereof and a second storage having second vertices formed on a bottom thereof, but at different locations from the first vertices, and store articles including substrates or consumables for manufacturing a semiconductor device,
• wherein
• the transport items include pods, which accommodate the reticles, and front opening unified pods (FOUPs), which accommodate the substrates, and
• the support unit includes:
• a base part forming a bottom surface and including a perforated plate;
• four first block parts provided on the base part and including first separation prevention surfaces, on which the first vertices are positioned, and which surround corners of the first storage, form L-shaped structures having the same angle as the corners of the first storage, face or adjoin circumferential surfaces or the corners of the first storage, and are right-angled with respect to the base part, first support surfaces, which have upper ends in contact with a bottom surface of the second storage, and first inclined surfaces, which are upwardly inclined in an outward direction away from a direction toward the first storage, between the first support surfaces and the first separation prevention surfaces;
• second block parts provided on the four first block parts and including second separation prevention surfaces, on which the second vertices are positioned, and which surround corners of the second storage, form L-shaped structures having the same angle as the corners of the second storage, face or adjoin circumferential surfaces or the corners of the second storage, and are right-angled with respect to the first block parts, and second inclined surfaces, which extend from above the second separation prevention surfaces and are upwardly inclined in the outward direction;
• spring plungers protruding from the base part, between the first block parts, and having a lower part of the first storage fitted thereinto, and having a minimum height equal to, or less than, a height of the first support surfaces;
• and
• a reflector provided on the base part.