Processing system and transfer method

A processing system comprising:

• a chamber in which a consumable member is installed;
• a storage module configured to store the consumable member;
• a position detection sensor configured to detect a position of the consumable member;
• a vacuum transfer module connected to the chamber and the storage module, the vacuum transfer module having a transfer robot configured to transfer the consumable member between the chamber and the storage module;
• and
• a controller,
• wherein the controller is configured to perform processes of:
• (f) detecting a position of a used consumable member installed in the chamber by the position detection sensor;
• (g) detecting a position of an unused consumable member housed in the storage module by the position detection sensor;
• and
• (h) transferring the unused consumable member from the storage module to the chamber, and
• wherein the process (h) includes adjusting a position at which the unused consumable member transferred from the storage module to the chamber is to be positioned on the basis of the position of the used consumable member detected in the process (f) and the position of the unused consumable member detected in the process (g).

A method of transferring a consumable member in a processing system including a chamber in which a consumable member is installed, a storage module configured to store the consumable member, a position detection sensor configured to detect a position of the consumable member, and a vacuum transfer module connected to the chamber and the storage module, the vacuum transfer module having a transfer robot configured to transfer the consumable member between the chamber and the storage module, the method comprising processes of:

• (a) transferring the consumable member installed in the chamber to the storage module by the transfer robot;
• (b) detecting a position of the consumable member transferred to the storage module by the position detection sensor;
• and
• (c) transferring a new consumable member different from the consumable member from the storage module to the chamber by the transfer robot at a position adjusted based on the position of the consumable member detected in the process (b).