Hydrogen fluoride detection using mass spectrometry
AssigneeSYFT Technologies Limited
InventorsCaleb Allpress, Richard Butler
Life of this patent
Estimating the term…
Abstract
Systems and methods are described that facilitate effective detection and quantification of hydrogen fluoride within a sample utilizing mass spectrometry (MS). A MS analysis is performed on a gas sample to obtain an unfiltered set of MS signal data. Hydrogen fluoride (HF) is removed from the gas sample by filtration to form a HF filtered gas sample, and MS analysis is performed on the HF filtered gas sample to obtain a filtered set of MS signal data. The filtered set of MS signal data is compared with the unfiltered set of MS signal data, and a presence and/or concentration of HF within the gas sample is determined based upon the comparison.
Claims18
A mass spectrometry (MS) detection system with hydrogen fluoride (HF) specificity, the system comprising:
- a MS detector to analyze a gas sample and determine a presence and/or a concentration of a plurality of chemical species within the gas sample;
- at least one sample flow line to facilitate flow of the gas sample from a sample source at a selected environment to an inlet of the MS detector;
- and
- a selective hydrogen fluoride scrubber coupled with the sample flow line, wherein the scrubber filters hydrogen fluoride (HF) from the gas sample prior to delivery to the inlet of the MS detector;
- wherein the system is configured to selectively permit a switch between a first flow of unfiltered gas sample to the inlet of the MS detector and a second flow of HF filtered gas sample to the inlet of the MS detector.
A mass spectrometry (MS) detection system with hydrogen fluoride (HF) specificity, the system comprising:
- a MS detector to analyze a gas sample and determine a presence and/or a concentration of chemical species within the gas sample;
- a sample flow line that provides the gas sample from a selected environment to the MS detector, the sample flow line including a diverter to selectively divert the gas sample between a first sample line and a second sample line, wherein each of the first and second sample lines provide the gas sample to a MS inlet of the MS detector;
- a selective hydrogen fluoride scrubber (SHFS) provided in the second sample line, wherein the SHFS filters hydrogen fluoride (HF) from the gas sample prior to delivery to the inlet of the MS detector;
- and
- a controller that selectively controls the MS detector so as to facilitate delivery and analysis of the gas sample to the MS inlet in an unfiltered state via the first sample line and delivery and analysis of the gas sample to the MS inlet in a HF filtered state via the second sample line, wherein the controller further facilitates a determination of HF presence and/or HF concentration within the gas sample based upon a comparison of MS analysis of the sample gas in the unfiltered state and MS analysis of the sample gas in the HF filtered state.
A method for detection of hydrogen fluoride (HF) within a gas sample comprising:
- performing mass spectrometry (MS) analysis via a MS detector on a gas sample to obtain an unfiltered set of MS signal data;
- removing hydrogen fluoride (HF) from the gas sample by filtration to form a HF filtered gas sample;
- performing mass spectrometry (MS) analysis on the HF filtered gas sample to obtain a filtered set of MS signal data;
- comparing the filtered set of MS signal data with the unfiltered set of MS signal data;
- and
- determining a presence and/or a concentration of HF within the gas sample based upon the comparison.
Dependencies are inferred from the claim text.