Power adjustment method of upper electrode power supply and semiconductor process apparatus

A semiconductor process apparatus comprising:

• a plurality of process chambers, the semiconductor process apparatus being configured to adjust power of upper electrode power supplies of the plurality of process chambers, any one process chamber of the plurality of process chambers being used as a reference process chamber, a process chamber of the other process chambers that performs a semiconductor process step being a current process chamber;
• an acquisition unit configured to obtain a processing load of an upper electrode power supply of the reference process chamber and a processing load of an upper electrode power supply of the current process chamber corresponding to the semiconductor process step;
• a calculation unit configured to, when starting the semiconductor process step, determine a power compensation coefficient corresponding to the semiconductor process step for the current process chamber relative to the reference process chamber according to the processing load of the current process chamber and the processing load of the reference process chamber;
• and
• a control unit configured, when performing the semiconductor process step to control the upper electrode power supply of the current process chamber to output a compensation power, the compensation power being a product of a set power of the upper electrode power supply of the current process chamber corresponding to the semiconductor process step and the corresponding power compensation coefficient.