Pattern defect inspection device and pattern defect inspection method

A pattern defect inspection device comprising:

• an inspection apparatus configured to inspect a pattern on a substrate;
• a database storing a pattern layout including a plurality of defect patterns from the inspection apparatus, a field of view (FOV) size, a target inspection time, and a target measurement number;
• and
• a processor configured to set a plurality of inspection regions of the inspection apparatus based on the pattern layout,
• wherein the processor is configured to
• measure a number of defect patterns in each of the plurality of inspection regions based on the FOV size,
• determine whether the plurality of inspection regions overlap by setting one of the plurality of inspection regions as a reference region, the reference region set based on an order in which the number of defect patterns increases,
• remove an overlapping region overlapping the reference region,
• select an inspection region from among the plurality of inspection regions, other than the overlapping region which is removed, as a final inspection region, and correct the FOV size and the target measurement number and reselect the plurality of inspection regions when an expected inspection time for the final inspection region exceeds the target inspection time.

A pattern defect inspection method comprising:

• searching for region defect patterns existing in at least one of a plurality of inspection regions in a pattern layout using a binary search, the patter layout including a plurality of defect patterns;
• arranging the plurality of inspection regions in a descending order based on a number of the region defect patterns in the plurality of inspection regions;
• removing at least one overlapping region, among the plurality of inspection regions, based on a field of view (FOV) size;
• selecting an inspection region, other than the overlapping region, from among the plurality of inspection regions, as a final inspection region;
• and
• inspecting a pattern on a substrate corresponding to the final inspection region.