Touch sensing unit, display device and manufacturing method thereof

A display device, comprising:

• a display panel;
• and
• a touch sensing unit disposed on the display panel,
• wherein the touch sensing unit includes:
• a substrate;
• a touch electrode disposed in a touch sensor area of the substrate;
• and
• a touch signal line connected to the touch electrode and that extends to a touch peripheral area of the substrate,
• wherein the touch signal line includes a first conductive layer disposed on the substrate, and a second conductive layer disposed on the first conductive layer with an insulating layer interposed therebetween, wherein the second conductive layer is in contact with the first conductive layer through a contact hole in the insulating layer,
• the first conductive layer includes at least one of Mo, MoNb, Ti or Ta, and
• the second conductive layer includes at least one of Al or AlNb.

A manufacturing method of a touch sensor unit, the manufacturing method comprising:

• preparing a substrate;
• and
• forming a touch signal line on the substrate,
• wherein forming the (1-1)th touch signal line includes:
• forming a first conductive layer on the substrate;
• forming an insulating layer on the first conductive layer;
• forming a contact hole in the insulating layer, wherein contact hole exposes at least a portion of the first conductive layer;
• and
• forming a second conductive layer on the insulating layer, wherein the second conductive layer is in contact with the first conductive layer through the contact hole,
• wherein the first conductive layer includes at least one of Mo, MoNb, Ti or Ta, and
• the second conductive layer includes at least one of Al or AlNb.