Control of semiconductor manufacturing equipment in mixed reality environments

A Mixed Reality (MR) headset configured to control a semiconductor manufacturing tool in an MR environment, the MR headset comprising:

• one or more processors;
• a display coupled to the one or more processors;
• one or more cameras;
• and
• one or more memories storing computer-executable instructions which, when executed, cause the one or more processors to:
• establish a wireless communication channel with an MR control system of a semiconductor manufacturing tool;
• receive operational information associated with the semiconductor manufacturing tool from the MR control system;
• and
• cause content associated with the operational information and one or more control features to be rendered in an MR environment.

A Mixed-Reality (MR) control system comprising:

• one or more processors;
• one or more memory devices storing computer-executable instructions which, when executed, cause the one or more processors to:
• establish a wireless communication channel with an MR headset;
• obtain sensor data representative of sensor output from a semiconductor manufacturing tool;
• determine operational information of the semiconductor manufacturing tool based on the sensor data;
• and
• cause the operational information to be transmitted to the MR headset via the communication channel.

A method for controlling a semiconductor manufacturing tool via an MR session, the method comprising:

• establishing, by an MR headset, a wireless communication channel with an MR control system;
• obtaining, by the MR control system, sensor data representative of sensor output from a semiconductor manufacturing tool;
• determining, by the MR control system, operational information associated with the semiconductor manufacturing tool and based, at least in part, on the sensor data;
• transmitting, by the MR control system and responsive to the wireless communication channel being established with an MR headset, the operational information associated with the semiconductor manufacturing tool to the MR headset via the wireless communication channel;
• receiving, by the MR headset, the operational information associated with the semiconductor manufacturing tool from the MR control system;
• and
• rendering, by the MR headset, content associated with the operational information and one or more control features in an MR environment.