An inspection tool, method and lithographic apparatus
AssigneeASML Netherlands B.V.
InventorShikhar BHARDWAJ
Life of this patent
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Abstract
A tool for assessing a hole property of one or more holes in a component of a lithographic apparatus, the tool including: an assessment substrate; a fluid supply configured to supply a jet of fluid from each of the one or more holes to a first surface of the assessment substrate, wherein the fluid is supplied at a fluid temperature such that the one or more jets of fluid cause local temperature variations in at least part of the assessment substrate; and an infrared sensor configured to sense a temperature distribution of the assessment substrate in dependence on the local temperature variations.
Claims20
A tool for assessing a hole property of one or more holes in a component of a lithographic apparatus, the tool comprising:
- an assessment substrate;
- a fluid supply configured to supply a jet of fluid from each of the one or more holes to a surface of the assessment substrate, wherein the fluid is supplied at a fluid temperature such that the one or more jets of fluid cause local temperature variations in at least part of the assessment substrate;
- and
- an infrared sensor configured to sense a temperature distribution of the assessment substrate in dependence on the local temperature variations.
A method of assessing a hole property of one or more holes in a component of a lithographic apparatus, the method comprising:
- supplying a jet of fluid from each of the one or more holes to a surface of an assessment substrate, wherein the fluid is supplied at a fluid temperature such that the one or more jets of fluid cause local temperature variations in at least part of the assessment substrate;
- sensing, by an infrared sensor, a temperature distribution of the assessment substrate in dependence on the local temperature variations;
- and
- assessing the hole property in dependence on the sensed temperature distribution.
Dependencies are inferred from the claim text.