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US 2024/0192586 A1Published application
Pellicle Frame Laminate and Method for Manufacturing Pellicle Using Said Laminate
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsYu Yanase, Toru Shirasaki
Life of this patent
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Abstract
The present disclosure provides a pellicle frame laminate with a first adhesive agent layer on an upper end face of a pellicle frame having the upper end face and a lower end face, the first adhesive agent layer being covered with a first protective sheet; and a second adhesive agent layer on the lower end face, the second adhesive agent layer being covered with a second protective sheet.
Claims25
A pellicle frame laminate comprising:
- a first adhesive agent layer on an upper end face of a pellicle frame having the upper end face and a lower end face, the first adhesive agent layer being covered with a first protective sheet;
- and
- a second adhesive agent layer on the lower end face, the second adhesive agent layer being covered with a second protective sheet.
Dependencies are inferred from the claim text.