Light Source, MEMS Optical Switch, Sensor and Methods for Manufacturing the Same

A microelectromechanical system (MEMS) optical switch, comprising:

• a mono-crystalline aluminum oxide substrate;
• a monolithic silicon nitride optical waveguide having a thickness of 500 nm or more, and which is deposited on the substrate, said optical waveguide comprising:
• a base part deposited onto the substrate, wherein the first base is configured to receive a beam of light, and
• a suspended part having a first end at which the suspended part is integrally connected to the base part and a second end configured to emit said beam of light;
• a light reception unit comprising an optical waveguide;
• an actuator configured for displacing the second end relative to the light reception unit in response to an actuation signal to allow or prevent the light beam emitted by the second end to enter the optical waveguide of the light reception unit.