Methods and apparatus for calculating and maintaining an optimal sample position in an interferometric microscope
AssigneeRefeyn Ltd
InventorsGavin YOUNG, Daniel COLE
Life of this patent
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Abstract
There is provided a method of calculating a temperature corrected sample position in an interferometric microscope, the method comprising projecting an autofocus beam onto the sample location to form a reflected ring of radiation, detecting an uncalibrated radius. R, of a peak of the annulus of the reflected ring which indicates an uncalibrated sample position, detecting one or more of the width of the annulus or an intensity of the annulus and calculating a calibrated radius Rnorm using at least one of the width of the annulus or the intensity of the annulus to determine the temperature dependent corrected sample position.
Claims14
A method of calculating a temperature corrected measured sample position in an interferometric microscope, the method comprising:
- projecting an autofocus beam onto the sample location to form a reflected ring of radiation;
- detecting an uncalibrated radius, R, of a peak of the annulus of the reflected ring which indicates an uncalibrated sample position;
- detecting one or more of the width of the annulus or an intensity of the annulus;
- calculating a calibrated radius Rnorm using at least one of the width of the annulus or the intensity of the annulus to determine the temperature corrected measured sample position.
An interferometric scattering microscope comprising:
- a sample holder for holding a sample in a sample location;
- an illumination source arranged to provide illuminating light;
- a detector;
- an optical system being arranged to direct illuminating light onto the sample location and being arranged to collect output light in reflection, the output light comprising both light scattered from the sample location and illuminating light reflected from the sample location, and to direct the output light to the detector;
- and
- computer program means configured to instruct the apparatus to carry out the steps according to any one of the preceding claims.
Dependencies are inferred from the claim text.