Photonic device mechanically isolated from a substrate
AssigneeCommissariat à I'Énergie Atomique et aux Énergies Alternatives
InventorsGuillaume Jourdan, Marc Gely
Life of this patent
Estimating the term…
Abstract
A photonic device including a substrate and a structure. The structure includes a support, an optical resonator fixed to the support, and a portion of a waveguide optically coupled to the resonator and fixed to the support. The structure is suspended above the substrate. The portion of the waveguide and the resonator are arranged on a same side of the support. The support is a first portion of a layer. A second portion of the layer is fixed to the substrate. The support is mechanically coupled to the second portion of the layer.
Claims25
Photonic device comprising:
- a substrate;
- and
- a structure comprising a support, an optical resonator fixed to the support, and a portion of a waveguide, the portion of the waveguide being optically coupled to the optical resonator, wherein:
- the portion of the waveguide is fixed to the support;
- the structure is suspended above the substrate;
- the portion of the waveguide and the resonator are arranged on a same side of the support, for example under the support;
- the support corresponds to a first portion of a first layer;
- a second portion of the first layer is fixed to the substrate;
- and
- the support is mechanically coupled to the second portion of the first layer.
Device according to claim 10, wherein the mobile portion of the support is mechanically coupled to the rest of the support by flexible links at least partly defined in the first portion of the first layer.
Dependencies are inferred from the claim text.