Inspection apparatus and method

An inspection method, comprising:

• preparing a light source, an inspection object that includes a first part and a second part different from the first part, a separator that includes a frame in which an opening is defined and a separation member in the opening, and an inspection module;
• placing the separator on the inspection object, placing the inspection module spaced apart from the inspection object across the separator, and irradiating, by the light source, a beam to the inspection object;
• obtaining data converted from a beam incident from the inspection object through the separator onto the inspection module;
• and
• based on a grayscale level of a comparative data, deriving a separation critical value from data about a first beam and data about a second beam in the beam incident onto the inspection module, wherein the first beam and the second beam have different critical values from each other.

An inspection apparatus, comprising:

• a light source configured to irradiate a beam to an inspection object including a first part and a second part different from the first part;
• an inspection module spaced apart from the inspection object and onto which a beam, whose path is changed after being irradiated to the inspection object, is incident;
• and
• a separator between the inspection object and the inspection module and through which at least a portion of the beam, whose path is changed, passes,
• wherein the separator includes:
• at least one first separation member configured to convert a beam, which passes therethrough, into a first beam;
• at least one second separation member configured to convert a beam, which passes therethrough, into a second beam;
• and
• a frame, which supports the first separation member and the second separation member.