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US 2024/0192133 A1Published application
Dark-field inspection device with real time variable function
AssigneeNextin, Inc.
InventorsTae Hoon Park, Oh Hyung Kwon
Life of this patent
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Abstract
The present invention relates to a dark-field inspection device, and more particularly, to a dark-field inspection device capable of varying a wavelength of illumination light, selectively receiving a wavelength of scattered light, and adjusting an irradiation area of the illumination light.
Claims15
A dark-field inspection device, comprising:
- a lighting unit that illuminates a sample with illumination light;
- and
- a light receiving unit that collects scattered light scattered from the sample when the illumination light is irradiated to the sample,
- wherein the lighting unit is configured to vary a wavelength of the illumination light irradiated from the lighting unit.
1 more element
Dependencies are inferred from the claim text.