Method of detecting leakage
AssigneeEbara Corporation
InventorsYosuke NAGASAWA, Tensei SATO, Ryuya KOIZUMI
Life of this patent
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Abstract
There is provided a method of detecting a leakage of a substrate holder in an apparatus for plating. The method of detecting the leakage comprises: placing the substrate holder that holds a substrate, into a tank that is filled with a liquid; supplying a gas into an internal space of the substrate holder that seals an outer circumferential portion of the substrate; and taking an image of the liquid surrounding the substrate holder in a state that the internal space of the substrate holder is pressurized by the gas and analyzing one or a plurality of taken images to determine presence or absence of gas bubbles in the liquid and thereby detect a leakage of the substrate holder.
Claims20
A method of detecting a leakage that detects a leakage of a substrate holder in an apparatus for plating, the method of detecting the leakage comprising:
- placing the substrate holder that holds a substrate, into a tank that is filled with a liquid;
- supplying a gas into an internal space of the substrate holder that seals an outer circumferential portion of the substrate;
- and
- taking an image of the liquid surrounding the substrate holder in a state that the internal space of the substrate holder is pressurized by the gas and analyzing one or a plurality of taken images to determine presence or absence of gas bubbles in the liquid and thereby detect a leakage of the substrate holder.
A non-volatile storage medium configured to store therein a program that causes a computer to perform a command for detecting a leakage of a substrate holder in an apparatus for plating, wherein the command comprises:
- placing the substrate holder that holds a substrate, into a tank that is filled with a liquid;
- supplying a gas into an internal space of the substrate holder that seals an outer circumferential portion of the substrate;
- and
- taking an image of the liquid surrounding the substrate holder in a state that the internal space of the substrate holder is pressurized by the gas and analyzing one or a plurality of taken images to determine presence or absence of gas bubbles in the liquid and thereby detect a leakage of the substrate holder.
An apparatus for detecting a leakage that detects a leakage of a substrate holder in an apparatus for plating, the apparatus for detecting the leakage comprising:
- a gas injection device configured to supply a gas into an internal space of a substrate holder that holds a substrate;
- one or a plurality of cameras configured to take an image of a liquid surrounding the substrate holder in a state that the substrate holder having the internal space pressurized by the gas is soaked in the liquid in a tank;
- and
- a control device configured to analyze one or a plurality of taken images to determine presence or absence of gas bubbles in the liquid and thereby detect a leakage of the substrate holder.
Dependencies are inferred from the claim text.